Modeling and Simulation of the Thermal Drift Characteristics of the Piezoresistive Pressure Sensor
2010 ◽
Vol 2010
(HITEC)
◽
pp. 000373-000378
Keyword(s):
Piezoresistive pressure sensors based on Silicon have a large thermal drift because of their high sensitivity to temperature (ten times more sensitive to temperature than metals). So the study of the thermal behavior of these sensors is essential to define the parameters that cause the drift of the output characteristics. In this study, we adopted the behavior of 2nd degree gauges depending on the temperature. Then we model the thermal behavior of the sensor and its characteristics.
2021 ◽
2021 ◽
2021 ◽
2012 ◽
Vol 27
(02)
◽
pp. 1350011
◽
2011 ◽
Vol 254
◽
pp. 94-98
◽