scholarly journals Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy

Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 439 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
R. Jagdheesh ◽  
José Ocaña
Keyword(s):  
Design Optimization ◽  
Pressure Sensor ◽  
High Accuracy ◽  
Piezoresistive Pressure Sensor

scholarly journals A Smart High Accuracy Silicon Piezoresistive Pressure Sensor Temperature Compensation System

Sensors ◽  
2014 ◽  
Vol 14 (7) ◽  
pp. 12174-12190 ◽  
Author(s):  
Guanwu Zhou ◽  
Yulong Zhao ◽  
Fangfang Guo ◽  
Wenju Xu
Keyword(s):  
Pressure Sensor ◽  
Temperature Compensation ◽  
High Accuracy ◽  
Compensation System ◽  
Piezoresistive Pressure Sensor ◽  
Sensor Temperature

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

2013 ◽  
Vol 313-314 ◽  
pp. 666-670 ◽  
Author(s):  
K.J. Suja ◽  
Bhanu Pratap Chaudhary ◽  
Rama Komaragiri
Keyword(s):  
Pressure Sensor ◽  
Integrated Circuit ◽  
Output Voltage ◽  
Pressure Sensors ◽  
Micro Electro Mechanical System ◽  
Constant Thickness ◽  
Piezoresistive Pressure Sensor ◽  
Wide Pressure Range ◽  
Processing Techniques ◽  
Wide Pressure

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

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