Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications

2006 ◽  
Vol 16 (10) ◽  
pp. 2060-2066 ◽  
Author(s):  
C Pramanik ◽  
H Saha ◽  
U Gangopadhyay
Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 439 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
R. Jagdheesh ◽  
José Ocaña

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 664 ◽  
Author(s):  
Junsong Hu ◽  
Junsheng Yu ◽  
Ying Li ◽  
Xiaoqing Liao ◽  
Xingwu Yan ◽  
...  

The reasonable design pattern of flexible pressure sensors with excellent performance and prominent features including high sensitivity and a relatively wide workable linear range has attracted significant attention owing to their potential application in the advanced wearable electronics and artificial intelligence fields. Herein, nano carbon black from kerosene soot, an atmospheric pollutant generated during the insufficient burning of hydrocarbon fuels, was utilized as the conductive material with a bottom interdigitated textile electrode screen printed using silver paste to construct a piezoresistive pressure sensor with prominent performance. Owing to the distinct loose porous structure, the lumpy surface roughness of the fabric electrodes, and the softness of polydimethylsiloxane, the piezoresistive pressure sensor exhibited superior detection performance, including high sensitivity (31.63 kPa−1 within the range of 0–2 kPa), a relatively large feasible range (0–15 kPa), a low detection limit (2.26 pa), and a rapid response time (15 ms). Thus, these sensors act as outstanding candidates for detecting the human physiological signal and large-scale limb movement, showing their broad range of application prospects in the advanced wearable electronics field.


2020 ◽  
Author(s):  
Yunlu Lian ◽  
He Yu ◽  
Mingyuan Wang ◽  
Xiaonan Yang ◽  
Hefei Zhang

Abstract Flexible pressure sensors have attracted increasing attention due to their potential applications in wearable human health monitoring and care systems. Herein, we present a facile approach for fabricating all-textile-based piezoresistive pressure sensor with integrated Ag nanowire-coated fabrics. It fully takes advantage of the synergistic effect of the fiber/yarn/fabric multi-level contacts, leading to the ultrahigh sensitivity of 3.24×10 5 kPa −1 at 0–10 kPa and 2.16×10 4 kPa −1 at 10–100 kPa, respectively. Furthermore, the device achieved a fast response/relaxation time (32/24 ms), and a high stability (>1000 loading/unloading cycles). Thus, such all-textile pressure sensor with high performance is expected to be applicable in the fields of smart cloths, activity monitoring and healthcare device.


RSC Advances ◽  
2016 ◽  
Vol 6 (107) ◽  
pp. 105206-105210 ◽  
Author(s):  
Y. Mouhamad ◽  
T. Mortensen ◽  
A. Holder ◽  
A. R. Lewis ◽  
T. G. G. Maffeis ◽  
...  

Screen printed pressure sensors based on direct contact of graphene nanoplatelets composite layers, with no intermediate physical gap, showed an effective piezoresistive response over a large force range.


Nanomaterials ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 2536
Author(s):  
Lin Gao ◽  
Junsheng Yu ◽  
Ying Li ◽  
Peiwen Wang ◽  
Jun Shu ◽  
...  

Porous microstructure pressure sensors that are highly sensitive, reliable, low-cost, and environment-friendly have aroused wide attention in intelligent biomedical diagnostics, human–machine interactions, and soft robots. Here, an all-tissue-based piezoresistive pressure sensor with ultrahigh sensitivity and reliability based on the bottom interdigitated tissue electrode and the top bridge of a microporous tissue/carbon nanotube composite was proposed. Such pressure sensors exhibited ultrahigh sensitivity (≈1911.4 kPa−1), fast response time (<5 ms), low fatigue of over 2000 loading/unloading cycles, and robust environmental degradability. These enabled sensors can not only monitor the critical physiological signals of the human body but also realize electrothermal conversion at a specific voltage, which enhances the possibility of creating wearable thermotherapy electronics for protecting against rheumatoid arthritis and cervical spondylosis. Furthermore, the sensor successfully transmitted wireless signals to smartphones via Bluetooth, indicating its potential as reliable skin-integrated electronics. This work provides a highly feasible strategy for promoting high-performance wearable thermotherapy electronics for the next-generation artificial skin.


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