scholarly journals Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement

2018 ◽  
Vol 139 ◽  
pp. 39-47 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
José L. Ocaña
Keyword(s):  
Design Optimization ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
Piezoresistive Pressure Sensor

scholarly journals Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy

Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 439 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
R. Jagdheesh ◽  
José Ocaña
Keyword(s):  
Design Optimization ◽  
Pressure Sensor ◽  
High Accuracy ◽  
Piezoresistive Pressure Sensor

The Study of Acceleration Effect for Piezoresistive Micro Pressure Sensor

2013 ◽  
Vol 455 ◽  
pp. 455-459 ◽  
Author(s):  
Bian Tian ◽  
Yu Long Zhao ◽  
Zhe Niu
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
Stress Distribution ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
The Finite Element Method ◽  
Piezoresistive Pressure Sensor ◽  
Traditional Structures ◽  
Acceleration Signals ◽  
Better Than

This paper reports the acceleration effect of a type of piezoresistive pressure sensor for micro-pressure measurement with a cross beam-membrane (CBM) structure. By using the finite element method (FEM) to analyze the stress distribution of the CBM structure and compared with the traditional structures under acceleration signals. Our results show that the sensitivity and linearity of the CBM is better than other structures, but also the acceleration disturb analysis indicating that the CBM structure offers low acceleration interference for micro-pressure measurement in vibration environments.

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