X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors
Keyword(s):
X Ray
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X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value.
Keyword(s):
1977 ◽
Vol 33
(4)
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pp. 593-601
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1971 ◽
Vol 61
(6)
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pp. 1639-1654
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Keyword(s):
1992 ◽
Vol 135
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pp. 311-313
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Keyword(s):