Design, development and testing of digital MEMS pressure sensor array for full-scale vibroacoustic measurements

2021 ◽  
Vol 263 (2) ◽  
pp. 4343-4354
Author(s):  
Pankaj Joshi ◽  
Frank Khelfa ◽  
Hendrik Lehmkuhl ◽  
Patrick Cordes ◽  
Patrick Naujoks ◽  
...  
Keyword(s):  
Thermal Insulation ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Pressure Sensors ◽  
Full Scale ◽  
Design Development ◽  
Cabin Noise ◽  
Digital Pressure ◽  
Noise Measurements ◽  
Strong Agreement

This manuscript addresses design, development, and application of micro-electro-mechanical systems (MEMS) based digital pressure sensor array for vibroacoustic measurements. These vibroacoustic measurements were conducted on a A320 type single aisle aircraft demonstrator subjected to broadband as well as tonal excitations. Cabin noise levels were measured with both condenser microphones as well as digital MEMS pressure sensor array. The measured cabin noise shows strong qualitative as well as quantitative agreement between both type of measurement devises for full scale cabin noise measurements inside an aircraft demonstrator. The observed strong agreement is valid for both single wall (fuselage with thermal insulation) and double wall (fuselage with thermal insulation and trim panel) cabin noise measurements. Such strong agreement within 1.0 dB tolerance is significantly motivating for further development of reliable but low-cost MEMS based measurement devises and corresponding efficient data post-processing algorithms for full scale vibroacoustic measurements in general. Additionally, it is also demonstrated that the large number of MEMS based digital pressure sensors can be used in areas where the physical space constraints are high. This demonstration shows strong potential to derive additional vibroacoustic indicator for the development and the testing of future noise control solutions in a non-traditional way.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

All-transparent graphene-based flexible pressure sensor array

2017 ◽  
Vol 31 (07) ◽  
pp. 1741009 ◽  
Author(s):  
Min Zhang ◽  
Yichuan Wu ◽  
Xudong Wang ◽  
Xiaohao Wang
Keyword(s):  
Human Skin ◽  
Spatial Resolution ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Pressure Sensors ◽  
Tactile Sensor ◽  
Middle Layer ◽  
Tactile Sensor Array ◽  
Flexible Pressure Sensor

In this work, we propose and demonstrate a flexible capacitive tactile sensor array based on graphene served as electrodes. The sensor array consists of 3 × 3 units with 3 mm spatial resolution, similar to that of human skin. Each unit has three layers. The middle layer with microstructured PDMS served as an insulator is sandwiched by two perpendicular graphene-based electrodes. The size of each unit is 3 mm × 3 mm and the initial capacitance is about 0.2 pF. High sensitivities of 0.73 kPa[Formula: see text] between 0 and 1.2 kPa and 0.26 kPa[Formula: see text] between 1.2 and 2.5 kPa were achieved on the fabricated graphene pressure sensors. The proposed flexible pressure sensor array shows a great potential on the application of electric skin or 3D touch control.

scholarly journals A Soft Pressure Sensor Array Based on a Conducting Nanomembrane

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 933
Author(s):  
Daekwang Jung ◽  
Kyumin Kang ◽  
Hyunjin Jung ◽  
Duhwan Seong ◽  
Soojung An ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Sensor Array ◽  
Pressure Sensors ◽  
Strain Range ◽  
High Sensitivity ◽  
Critical Issue ◽  
Mechanical Stimuli ◽  
Highly Sensitive ◽  
Accumulated Strain

Although skin-like pressure sensors exhibit high sensitivity with a high performance over a wide area, they have limitations owing to the critical issue of being linear only in a narrow strain range. Various strategies have been proposed to improve the performance of soft pressure sensors, but such a nonlinearity issue still exists and the sensors are only effective within a very narrow strain range. Herein, we fabricated a highly sensitive multi-channel pressure sensor array by using a simple thermal evaporation process of conducting nanomembranes onto a stretchable substrate. A rigid-island structure capable of dissipating accumulated strain energy induced by external mechanical stimuli was adopted for the sensor. The performance of the sensor was precisely controlled by optimizing the thickness of the stretchable substrate and the number of serpentines of an Au membrane. The fabricated sensor exhibited a sensitivity of 0.675 kPa−1 in the broad pressure range of 2.3–50 kPa with linearity (~0.990), and good stability (>300 Cycles). Finally, we successfully demonstrated a mapping of pressure distribution.

scholarly journals Highly Sensitive Textile-Based Capacitive Pressure Sensors Using PVDF-HFP/Ionic Liquid Composite Films

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 442
Author(s):  
Kyobin Keum ◽  
Jae Sang Heo ◽  
Jimi Eom ◽  
Keon Woo Lee ◽  
Sung Kyu Park ◽  
...  
Keyword(s):  
Ionic Liquid ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Vinylidene Fluoride ◽  
Composite Films ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Electronic Textiles ◽  
Poly Vinylidene Fluoride

Textile-based pressure sensors have garnered considerable interest in electronic textiles due to their diverse applications, including human–machine interface and healthcare monitoring systems. We studied a textile-based capacitive pressure sensor array using a poly(vinylidene fluoride)-co-hexafluoropropylene (PVDF-HFP)/ionic liquid (IL) composite film. By constructing a capacitor structure with Ag-plated conductive fiber electrodes that are embedded in fabrics, a capacitive pressure sensor showing high sensitivity, good operation stability, and a wide sensing range could be created. By optimizing the PVDF-HFP:IL ratio (6.5:3.5), the fabricated textile pressure sensors showed sensitivity of 9.51 kPa−1 and 0.69 kPa−1 in the pressure ranges of 0–20 kPa and 20–100 kPa, respectively. The pressure-dependent capacitance variation in our device was explained based on the change in the contact-area formed between the multi-filament fiber electrodes and the PVDF-HFP/IL film. To demonstrate the applicability and scalability of the sensor device, a 3 × 3 pressure sensor array was fabricated. Due to its matrix-type array structure and capacitive sensing mechanism, multi-point detection was possible, and the different positions and the weights of the objects could be identified.

Research of MOEMS Pressure Sensor

2013 ◽  
Vol 273 ◽  
pp. 524-527
Author(s):  
De En ◽  
Chang Sheng Zhou ◽  
Huang He Wei ◽  
Na Na Wei ◽  
Xiao Long Shi
Keyword(s):  
Mechanical System ◽  
Data Storage ◽  
Optical Communication ◽  
Pressure Sensor ◽  
Optical Switching ◽  
Sensor Array ◽  
New Technology ◽  
Pressure Sensors ◽  
Key Technology ◽  
Optical Pressure

In recent years, with the development of optical communication by leaps and bounds, promote the Micro-opto-electro-mechanical system (MOEMS) development. As a new technology, the MOEMS have been widely used in optical communication, optical switching, data storage, optical sensing and etc.. Compared with the traditional pressure sensors, the optical pressure sensor based on MOEMS has some unique advantages. In this paper, the structures, operation principles and fabrication processes of various MOEMS pressure sensors are described mainly. Finally, the structure and Key technology of a MOEMS pressure sensor array is presented in brief.

scholarly journals A Flexible and Highly Sensitive Inductive Pressure Sensor Array Based on Ferrite Films

Sensors ◽  
2019 ◽  
Vol 19 (10) ◽  
pp. 2406 ◽  
Author(s):  
Xinran Tang ◽  
Yihui Miao ◽  
Xinjian Chen ◽  
Baoqing Nie
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Pressure Sensors ◽  
Separation Distance ◽  
Spiral Inductor ◽  
Ferrite Film ◽  
Wearable Electronics ◽  
Highly Sensitive ◽  
Ultrahigh Sensitivity ◽  
Inductive Pressure

There is a rapid growing demand for highly sensitive, easy adaptive and low-cost pressure sensing solutions in the fields of health monitoring, wearable electronics and home care. Here, we report a novel flexible inductive pressure sensor array with ultrahigh sensitivity and a simple construction, for large-area contact pressure measurements. In general, the device consists of three layers: a planar spiral inductor layer and ferrite film units attached on a polyethylene terephthalate (PET) membrane, which are separated by an array of elastic pillars. Importantly, by introducing the ferrite film with an excellent magnetic permeability, the effective permeability around the inductor is greatly influenced by the separation distance between the inductor and the ferrite film. As a result, the value of the inductance changes largely as the separation distance varies as an external load applies. Our device has achieved an ultrahigh sensitivity of 1.60 kPa−1 with a resolution of 13.61 Pa in the pressure range of 0–0.18 kPa, which is comparable to the current state-of-the-art flexible pressure sensors. More remarkably, our device shows an outstanding stability when exposed to environmental interferences, e.g., electrical noises from skin surfaces (within 0.08% variations) and a constant pressure load for more than 32 h (within 0.3% variations). In addition, the device exhibits a fast response time of 111 ms and a good repeatability under cyclic pressures varying from 38.45 to 177.82 Pa. To demonstrate its practical usage, we have successfully developed a 4 × 4 inductive pressure sensor array into a wearable keyboard for a smart electronic calendar application.

scholarly journals Wearable Pressure Sensors: Textile‐Based Wireless Pressure Sensor Array for Human‐Interactive Sensing (Adv. Funct. Mater. 22/2019)

2019 ◽  
Vol 29 (22) ◽  
pp. 1970152
Author(s):  
Baoqing Nie ◽  
Rong Huang ◽  
Ting Yao ◽  
Yiqiu Zhang ◽  
Yihui Miao ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Pressure Sensors

scholarly journals Pressure Sensors: A Sensitive and Biodegradable Pressure Sensor Array for Cardiovascular Monitoring (Adv. Mater. 43/2015)

2015 ◽  
Vol 27 (43) ◽  
pp. 6953-6953 ◽  
Author(s):  
Clementine M. Boutry ◽  
Amanda Nguyen ◽  
Qudus Omotayo Lawal ◽  
Alex Chortos ◽  
Simon Rondeau-Gagné ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Pressure Sensors ◽  
Cardiovascular Monitoring

scholarly journals A Graphical Pressure Sensor Array With Multilayered Structure: Written Through Graphene Ink on Cellulose Paper Substrate

2021 ◽  
Author(s):  
Chao Ji ◽  
Qiang Zhang ◽  
Qiang Li ◽  
Zhen Pei ◽  
Dong Zhao ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Distance Perception ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Multilayered Structure ◽  
Fast Time ◽  
Cellulose Paper ◽  
Detection Of Objects ◽  
Sensors Array

Abstract Paper based flexible pressure sensors have received extensive attention due to their recoverability and accessibility. In this paper, we proposed graphical pressure sensors array with multilayered structure. A simple writing method was adopted to achieve the adsorption of sensitive materials on the fiber structure of cellulose paper. Pressure sensors with 1, 3, 5 and 7 stacked layers were fabricated and compared, respectively. The results show that the 7layers sensor combined high sensitivity (44 kPa-1) and fast time response (150 ms). The highly sensitive stacked paper-based sensor array realizes the pressure detection of objects and special-shaped surfaces. A pressure sensor base on commercial corrugated box was also fabricated to compare. The corrugated carton array was made to switch reminder devices for its convenience and accessibility. Since there are many scenarios that require a safe distance, especially under the influence of the COVID-19, the writable paper-based sensor array was used to realize graphical distance perception and warning.

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