scholarly journals Modeling and Simulation of MEMS based Pressure Sensor for Industrial Applications

2019 ◽  
Vol 9 (1) ◽  
pp. 1739-1743
Keyword(s):  
Modeling And Simulation ◽  
Pressure Sensor ◽  
Environmental Conditions ◽  
High Sensitivity ◽  
Industrial Applications ◽  
Comsol Multiphysics ◽  
Circular Membrane ◽  
Dimensional Changes ◽  
Simulation Results ◽  
Input Load

This paper presents an overview of design, modeling and simulation of MEMS pressure sensor is using COMSOL Multiphysics V4.3b. An attempt has been made to achieve high sensitivity by providing different structures for membrane (Circular, square, rectangle & triangle) with uniform surface area and thickness. Further, simulations have been carried out with various loads ranging from 0.1 to 1MPa assigning three materials viz., InP, GaAs and Silicon. From the analyses of simulation results, it has been observed that the pressure sensor with circular membrane provided InP material found to exhibit more deformation and high sensitivity of 17.3×10-12 for 10 µm thickness and 50.8×10-12 for 7 µm thickness. The reasons for enhancement in the sensitivity are discussed in detail as function of input load, dimensional changes of diaphragm and materials addition. These studies are highly useful to check and compute pressure in various industrial and environmental conditions.

Modeling and Simulation of the Thermal Drift Characteristics of the Piezoresistive Pressure Sensor

2010 ◽  
Vol 2010 (HITEC) ◽  
pp. 000373-000378
Author(s):  
R. Otmani ◽  
N. Benmoussa ◽  
K. Ghaffour
Keyword(s):  
Thermal Behavior ◽  
Modeling And Simulation ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Thermal Drift ◽  
Piezoresistive Pressure Sensor ◽  
Output Characteristics ◽  
Piezoresistive Pressure Sensors

Piezoresistive pressure sensors based on Silicon have a large thermal drift because of their high sensitivity to temperature (ten times more sensitive to temperature than metals). So the study of the thermal behavior of these sensors is essential to define the parameters that cause the drift of the output characteristics. In this study, we adopted the behavior of 2nd degree gauges depending on the temperature. Then we model the thermal behavior of the sensor and its characteristics.

scholarly journals Sensitivity and packaging improvement of an LCP pressure sensor for intracranial pressure measurement via FEM simulation

2019 ◽  
Vol 9 (5) ◽  
pp. 4044
Author(s):  
Preedipat Sattayasoonthorn ◽  
Jackrit Suthakorn ◽  
Sorayouth Chamnanvej
Keyword(s):  
Intracranial Pressure ◽  
Pressure Sensor ◽  
Pressure Range ◽  
3D Model ◽  
Fem Simulation ◽  
Comsol Multiphysics ◽  
Crystal Polymer ◽  
Previous Design ◽  
Simulation Results ◽  
Sensing Membrane

A biocompatible liquid crystal polymer (LCP) pressure sensor is proposed for measuring intracranial pressure (ICP) in Traumatic Brain Injury (TBI) patients. Finite element method using COMSOL multiphysics is employed to study the mechanical behavior of the packaged LCP pressure sensor in order to optimize the sensor design. A 3D model of the 8x8x0.2 mm LCP pressure sensor is simulated to investigate the parameters that significantly influence the sensor characteristics under the uniform pressure range of 0 to 50 mmHg. The simulation results of the new design are compared to the experimental results from a previous design. The result shows that reducing the thickness of the sensing membrane can increase the sensitivity up to six times of that previously reported. An improvement of fabrication methodology is proposed to complete the LCP packaging.

scholarly journals Design and Displacement Analysis of Three different Cantilever based MEMS Piezoresistive Pressure Sensor with Polymer (PDMS/PMMA) Thin Flim

2021 ◽  
Vol 11 (2) ◽  
pp. 1629-1640
Author(s):  
Kavitha K
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Comsol Multiphysics ◽  
Sensor Applications ◽  
Dimethyl Siloxane ◽  
Piezoresistive Pressure Sensor ◽  
Cantilever Structure ◽  
As Stress ◽  
P Type ◽  
High Range

This paper mainly focuses on to get high displacement from polymer based piezoresistive cantilever for MEMS/NEMS pressure sensor applications. The displacement has been analyzed and compared with three different cantilever using PDMS (Poly dimethyl siloxane) and PMMA (Poly methyl methacrylate) materials. The p-type silicon piezoresistors connected the form based on wheat stone bridge to get high sensible pressure sensor with respect to low response. An according to get high displacement, obviously the other performance of parameters such as stress, strain gets high range. So, this analyzed cantilever structure used to design a pressure sensor with high sensitivity. The design and simulation are done by using COMSOL Multiphysics.

Design and Simulation of Piezoresistive Pressure Sensor for Ocean Depth Measurements

2013 ◽  
Vol 411-414 ◽  
pp. 1552-1558
Author(s):  
Guan Rong Tang ◽  
Si Di ◽  
Xin Xu ◽  
Qiu Lan Chen
Keyword(s):  
Optimum Design ◽  
Deep Water ◽  
Pressure Sensor ◽  
Measurement Range ◽  
Comsol Multiphysics ◽  
Good Linearity ◽  
Piezoresistive Pressure Sensor ◽  
Simulation Results ◽  
Output Characteristics

This paper presents the design and simulation of a piezoresistive pressure sensor with wide operation range (up to the pressure of 1000 m-deep water). Structural and electrical simulations were carried out using COMSOL Multiphysics 4.3. The dimension of the membrane, and the geometry and placement of piezoresistors, were optimized through structural simulations. Electrical simulations were used to evaluate the performance of selected sensors. The output characteristics revealed good linearity throughout the measurement range with sensitivities of 0.4500~0.8964 mV/V/MPa. The optimum design of sensor was determined according to the simulation results.

scholarly journals Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Original Model ◽  
Ansys Software ◽  
Nonlinear Error ◽  
Sensor Model ◽  
Optimized Model ◽  
Simulation Results ◽  
Better Than

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.

scholarly journals Cheating at Craps

2021 ◽  
Vol 48 (4) ◽  
pp. 53-61
Author(s):  
Andrea Marin ◽  
Carey Williamson
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Modeling And Simulation ◽  
Analytical Model ◽  
Quantitative Evaluation ◽  
Mathematical Analysis ◽  
Simulation Modeling ◽  
Analytical Modeling ◽  
The World ◽  
Simulation Results

Craps is a simple dice game that is popular in casinos around the world. While the rules for Craps, and its mathematical analysis, are reasonably straightforward, this paper instead focuses on the best ways to cheat at Craps, by using loaded (biased) dice. We use both analytical modeling and simulation modeling to study this intriguing dice game. Our modeling results show that biasing a die away from the value 1 or towards the value 5 lead to the best (and least detectable) cheating strategies, and that modest bias on two loaded dice can increase the winning probability above 50%. Our Monte Carlo simulation results provide validation for our analytical model, and also facilitate the quantitative evaluation of other scenarios, such as heterogeneous or correlated dice.

scholarly journals A flexible and highly sensitive pressure sensor based on three-dimensional electrospun carbon nanofibers

RSC Advances ◽  
2021 ◽  
Vol 11 (23) ◽  
pp. 13898-13905
Author(s):  
Chuan Cai ◽  
He Gong ◽  
Weiping Li ◽  
Feng Gao ◽  
Qiushi Jiang ◽  
...  
Keyword(s):  
Carbon Nanofibers ◽  
Pressure Sensor ◽  
Carbon Nanofiber ◽  
Three Dimensional ◽  
High Sensitivity ◽  
Highly Sensitive ◽  
Sensitive Pressure

A three-dimensional electrospun carbon nanofiber network was used to measure press strains with high sensitivity.

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