Study on the Fabrication of the High Accuracy Optical Aspherical Mirror with Atmospheric Pressure Inductively Coupled Plasma Chemical Etching Technology
2021 ◽
Vol 2052
(1)
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pp. 012057
2009 ◽
Vol 37
(6)
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pp. 979-984
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Keyword(s):
2007 ◽
Vol 35
(2)
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pp. 204-214
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Keyword(s):
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2018 ◽
Vol 1124
◽
pp. 041024
2000 ◽
Vol 147
(4)
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pp. 1481
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