Etch-stop layer plasma chemical enhanced vapor deposition for oxide thin-film-transistor

Chinese Journal of Liquid Crystals and Displays ◽

10.3788/yjyxs20193401.0007 ◽

2019 ◽

Vol 34 (1) ◽

pp. 7-13

Author(s):

万云海 WAN Yun-hai ◽

邹志翔 ZOU Zhi-xiang ◽

林亮 LIN Liang ◽

杨成绍 YANG Cheng-shao ◽

黄寅虎 HUANG Yin-hu ◽

...

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Plasma Chemical ◽

Etch Stop ◽

Etch Stop Layer

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Investigating degradation behavior of hole-trapping effect under static and dynamic gate-bias stress in a dual gate a-InGaZnO thin film transistor with etch stop layer

Thin Solid Films ◽

10.1016/j.tsf.2016.01.035 ◽

2016 ◽

Vol 603 ◽

pp. 359-362 ◽

Author(s):

Po-Yung Liao ◽

Ting-Chang Chang ◽

Tien-Yu Hsieh ◽

Ming-Yen Tsai ◽

Bo-Wei Chen ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistor ◽

Gate Bias ◽

Degradation Behavior ◽

Bias Stress ◽

Hole Trapping ◽

Trapping Effect ◽

Dual Gate ◽

Etch Stop ◽

Etch Stop Layer

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Effect of Hydrogen in Zinc Oxide Thin-Film Transistor Grown by Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.2493 ◽

2007 ◽

Vol 46 (4B) ◽

pp. 2493-2495 ◽

Author(s):

Jungyol Jo ◽

Ogweon Seo ◽

Euihyuk Jeong ◽

Hyunseok Seo ◽

Byeongon Lee ◽

...

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Thin Film Transistor ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Organic Chemical ◽

Zinc Oxide Thin Film ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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A Bottom-Gate Indium-Gallium-Zinc Oxide Thin-Film Transistor With an Inherent Etch-Stop and Annealing-Induced Source and Drain Regions

IEEE Transactions on Electron Devices ◽

10.1109/ted.2014.2375194 ◽

2015 ◽

Vol 62 (2) ◽

pp. 574-579 ◽

Author(s):

Lei Lu ◽

Man Wong

Keyword(s):

Thin Film ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Indium Gallium Zinc Oxide ◽

Zinc Oxide Thin Film ◽

Etch Stop ◽

Indium Gallium ◽

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Coplanar amorphous silicon thin film transistor fabricated by inductively coupled plasma chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.368581 ◽

1998 ◽

Vol 84 (7) ◽

pp. 4006-4012 ◽

Author(s):

Sung Ki Kim ◽

Young Jin Choi ◽

Kyu Sik Cho ◽

Jin Jang

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Thin Film Transistor ◽

Chemical Vapor ◽

Plasma Chemical ◽

Silicon Thin Film ◽

Plasma Chemical Vapor Deposition ◽

Inductively Coupled

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Contact Properties between Low-Resistive Al-Based Source/Drain and InOx in Top-Gate Bottom-Contact Oxide Thin-Film Transistor for Application to the Vertical-TFT

Proceedings of the International Display Workshops ◽

10.36463/idw.2019.0570 ◽

2019 ◽

pp. 570

Author(s):

Sori Jeon ◽

Kwang-Heum Lee ◽

Seung-Hee Lee ◽

Chi-Sun Hwang ◽

Sang-Hee Ko Park

Keyword(s):

Thin Film ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

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Contact Properties between Low-Resistive Al-Based Source/Drain and InOx in Top-Gate Bottom-Contact Oxide Thin-Film Transistor for Application to the Vertical-TFT

Proceedings of the International Display Workshops ◽

10.36463/idw.2019.amdp1-23l ◽

2019 ◽

pp. 570

Author(s):

Sori Jeon ◽

Kwang-Heum Lee ◽

Seung-Hee Lee ◽

Chi-Sun Hwang ◽

Sang-Hee Ko Park

Keyword(s):

Thin Film ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

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Improved Mobility and Stability of Indium-free Oxide Thin Film Transistor by Metal Capping Layer

Proceedings of the International Display Workshops ◽

10.36463/idw.2019.amdp1-21l ◽

2019 ◽

pp. 563

Author(s):

Ji-Min Park ◽

Ho-Hyun Nahm ◽

Hyun-Suk Kim

Keyword(s):

Thin Film ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

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Transparent AMOLED Display Derived by Metal Oxide Thin Film Transistor with Praseodymium Doping

Proceedings of the International Display Workshops ◽

10.36463/idw.2019.amdp1-19l ◽

2019 ◽

pp. 557

Author(s):

HUA XU ◽

Miao XU ◽

Min Li ◽

Lei Wang ◽

Junbiao Peng

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film ◽

Praseodymium Doping

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Laser annealing of metal oxide thin film transistor

Chinese Journal of Liquid Crystals and Displays ◽

10.37188/yjyxs20203512.1211 ◽

2020 ◽

Vol 35 (12) ◽

pp. 1211-1221

Author(s):

Hong-long NING ◽

◽

Yu-xi DENG ◽

Jian-lang HUANG ◽

Zi-long LUO ◽

...

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Laser Annealing ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film

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Solution-Processed Oxide Thin-Film Transistor with Spin-Coated Zinc Tin Oxide Active Layer and Indium Zinc Oxide Source/Drain Electrodes

ECS Meeting Abstracts ◽

10.1149/ma2010-02/29/1824 ◽

2010 ◽

Keyword(s):

Thin Film ◽

Active Layer ◽

Tin Oxide ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Solution Processed ◽

Indium Zinc Oxide ◽

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