Spatially-Resolved Remote Plasma Atomic Layer Deposition Process for Moisture Barrier Al2O3 Films
2018 ◽
Vol 73
(1)
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pp. 45-52
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2018 ◽
Vol 73
(1)
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pp. 40-44
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2020 ◽
Vol 38
(2)
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pp. 022418
2014 ◽
Vol 78
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pp. 1243-1253
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2011 ◽
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2018 ◽
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pp. 06JF05
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