Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition

2013 ◽  
Vol 114 (17) ◽  
pp. 173511 ◽  
Author(s):  
Hyunsoo Jung ◽  
Hagyoung Choi ◽  
Heeyoung Jeon ◽  
Sanghun Lee ◽  
Hyeongtag Jeon
Keyword(s):  
Atomic Layer Deposition ◽  
Radio Frequency ◽  
Atomic Layer ◽  
Radio Frequency Plasma ◽  
Plasma Power ◽  
Power Dependence ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Frequency Plasma ◽  
Al2o3 Films

scholarly journals Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source

2011 ◽  
Vol 18 ◽  
pp. 100-106 ◽  
Author(s):  
Xingcun Li ◽  
Qiang Chen ◽  
Lijun Sang ◽  
Lizhen Yang ◽  
Zhongwei Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Radio Frequency ◽  
Atomic Layer ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Layer Deposition ◽  
Frequency Plasma

Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition

2014 ◽  
Vol 115 (7) ◽  
pp. 073502 ◽  
Author(s):  
Hyunsoo Jung ◽  
Heeyoung Jeon ◽  
Hagyoung Choi ◽  
Giyul Ham ◽  
Seokyoon Shin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Radio Frequency ◽  
Layer Structure ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition

Substrate dependence on the optical properties of Al2O3 films grown by atomic layer deposition

1997 ◽  
Vol 71 (25) ◽  
pp. 3604-3606 ◽  
Author(s):  
Y. Kim ◽  
S. M. Lee ◽  
C. S. Park ◽  
S. I. Lee ◽  
M. Y. Lee
Keyword(s):  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Substrate Dependence ◽  
Al2o3 Films
Sign in / Sign up

Export Citation Format

Share Document