Depth Control Method of AFM-Based Nanomachining with Diamond Tip in Deflection Mode
2007 ◽
Vol 10-12
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pp. 578-582
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Keyword(s):
The equations correlated the normal load and the tip penetration depth were derived through the theoretical analysis of the penetration process of the diamond tip. Verified by experiments, the equations can reflect the penetration process of the scratching machining system and provide theoretical basis for the optimization of depth control algorithm. The control of scratching depth realized in AFM deflection mode can effectively restrain the system drift during scratching process.
2014 ◽
Vol 1044-1045
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pp. 982-985
Keyword(s):
2012 ◽
Vol 151
◽
pp. 514-517
Keyword(s):
2012 ◽
Vol 433-440
◽
pp. 6825-6831
2018 ◽
Vol 24
(5)
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pp. 21-30
2011 ◽
Vol 314-316
◽
pp. 837-841
Keyword(s):
2014 ◽
Vol 989-994
◽
pp. 3105-3109
Keyword(s):
2011 ◽
Vol 317-319
◽
pp. 1373-1384
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Keyword(s):
Keyword(s):