Structure Analysis of UPC Type 3-DoF Rotational Spatial Compliant Parallel Manipulator
Nanomanipulation could be defined as the manipulation of nanometer size objects using a nanometer size end effector with ultra precision, which was enabled by the invention of Scanning Tunneling Microscopes (STM). However, most of the existing micromanipulators provide only planar 3-DoF or spatial 3-DoF translational motion characteristics. In this paper, a 3-DoF UPC type rotational spatial compliant parallel manipulator is presented. In order to develop the structure stiffness of this kind of spatial compliant parallel manipulator, structure analysis of this mechanism is proposed. A simple but useful method which based on screw theory and geometric constraint conditions is also proposed. The compliant parallel manipulator is driven by three piezoelectric actuators and the three actuators in this mechanism are arranged according to the Cartesian coordinate system. The results of experiments via ANSYS have shown the validation of the theoretical analysis.