Design of a 6-DOF VCM-Driven Micro Stage
2014 ◽
Vol 532
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pp. 3-6
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Keyword(s):
This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm3 and the motions are measured by laser interferometer and gap sensors.
Keyword(s):
2006 ◽
Vol 06
(04)
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pp. 493-512
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1958 ◽
Vol 62
(574)
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pp. 752-757
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2008 ◽
Vol E91-C
(10)
◽
pp. 1611-1615
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2015 ◽
Vol 2015
(0)
◽
pp. _S1110504--_S1110504-
Keyword(s):
2020 ◽
Vol 309
◽
pp. 112014
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