Development and Application of Electromagnetic Module in Multi-Fields Automatic Simulation Platform for Integrated Circuit Devices
2014 ◽
Vol 722
◽
pp. 194-197
Keyword(s):
According to integrated circuit (IC) devices, this study proposed a integrated automatic design platform including geometric modeling, finite element simulation analysis, experimental design etc. The platform is a software system, the development of which is driven by product design of IC device chambers. As a module of the platform, the electromagnetic fields simulation part is based on secondary development of Ansys HFSS and the Python language to transfer data, build model and analyze automatically. The validity of the electromagnetic simulation module is verified by an example of PECVD SC300 chamber.
2013 ◽
Vol 389
◽
pp. 364-370
2013 ◽
Vol 680
◽
pp. 410-416
◽
2014 ◽
Vol 488-489
◽
pp. 589-592
2011 ◽
Vol 402
◽
pp. 753-757
◽
Keyword(s):
2014 ◽
Vol 915-916
◽
pp. 146-149
Keyword(s):