Characterization of Nanoscale Ultrasonic Transducer Elements as Effective Acoustical Devices
2016 ◽
Vol 860
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pp. 35-40
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Keyword(s):
The generation and detection of ultrasound in air has many applications in the field of ranging, non-destructive evaluation, microscopy and the most impactful in medical imaging. Conventional designs of electrostatic transducers have large electrode spacing of 50-100 μm which reduces the sensitivity of these capacitors. In the last one and a half decade silicon micromachining is used to define capacitors with gap spacing as small as 500Å, making it possible highly efficient capacitive micromachined ultrasonic transducers (CMUTs). In this paper a CMUT element is analytically characterized and FEM simulated. The observations are compared with published experimental results and excellent agreement is found between them.
2001 ◽
Vol 5
(3)
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pp. 165-180
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2013 ◽
Vol 816-817
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pp. 892-896
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