Membrane Displacement Behavior of Capacitive Micromachined Ultrasonic Transducers under Static Bias

2013 ◽  
Vol 816-817 ◽  
pp. 892-896 ◽  
Author(s):  
Reshmi Maity ◽  
R.K. Thapa ◽  
S. Baishya
Keyword(s):  
Single Cell ◽  
Ultrasonic Transducer ◽  
Ultrasonic Transducers ◽  
Critical Parameters ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Suspended Membrane ◽  
Displacement Behavior ◽  
Tension Analysis ◽  
Membrane Deflection ◽  
Membrane Displacement

The present paper focuses on the theory of vibration of a circular micro-machined ultrasonic transducer to model a single cell of Capacitive Micromachined Ultrasonic Transducers (CMUTs) and it describes the displacement behavior of membrane with respect to applied static bias following Masons analysis of a suspended membrane under tension. Analysis of the critical parameters like collapse voltage and membrane deflection is made and compared with experimental results to verify the validity of the model.

scholarly journals Advances in Capacitive Micromachined Ultrasonic Transducers

Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 152 ◽  
Author(s):  
Kevin Brenner ◽  
Arif Ergun ◽  
Kamyar Firouzi ◽  
Morten Rasmussen ◽  
Quintin Stedman ◽  
...  
Keyword(s):  
Review Paper ◽  
Rapid Development ◽  
Ultrasonic Transducer ◽  
Ultrasonic Transducers ◽  
Imaging Systems ◽  
Future Trends ◽  
Levels Of Abstraction ◽  
Commercial Success ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducer

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

scholarly journals Measurements of acoustic radiation force of ultrahigh frequency ultrasonic transducers using model-based approach

2021 ◽  
Author(s):  
Sangnam Kim ◽  
Sunho Moon ◽  
Sunghoon Rho ◽  
Sangpil Yoon
Keyword(s):  
Single Cell ◽  
Acoustic Radiation ◽  
Ultrasonic Transducer ◽  
Radiation Force ◽  
Solid Sphere ◽  
Acoustic Radiation Force ◽  
Ultrasonic Transducers ◽  
Ultrahigh Frequency ◽  
Cell Phenotype ◽  
Target Cells

AbstractEven though ultrahigh frequency ultrasonic transducers over 60 MHz have been used for single cell level manipulation such as intracellular delivery, acoustic tweezers, and stimulation to investigate cell phenotype and cell mechanics, no techniques have been available to measure actual acoustic radiation force (ARF) applied to target cells. Therefore, we have developed an approach to measure ARF of ultrahigh frequency ultrasonic transducers using theoretical model of the dynamics of a solid sphere in a gelatin phantom. To estimate ARF at the focus of 130 MHz transducer, we matched measured maximum displacements of a solid sphere with theoretical calculations. We selected appropriate ranges of input voltages and pulse durations for single cell applications and estimated ARF were in the range of tens of pN to nN. FRET live cell imaging was demonstrated to visualize calcium transport between cells after a target single cell was stimulated by the developed ultrasonic transducer.

Investigation of the Half Bridge and Transformer Push–Pull Pulser Topologies for Ultrasonic Transducer Excitation

2015 ◽  
Vol 24 (05) ◽  
pp. 1550062 ◽  
Author(s):  
Linas Svilainis ◽  
Vytautas Dumbrava ◽  
Andrius Chaziachmetovas
Keyword(s):  
Experimental Investigation ◽  
Ultrasonic Transducer ◽  
Electrical Power ◽  
Rectangular Pulse ◽  
Ultrasonic Transducers ◽  
Electromagnetic Acoustic Transducer ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Acoustic Transducer ◽  
Electrical Power Consumption ◽  
Transformer Output

Comparison of two high power pulser topologies is presented. Pulser design was aimed for piezoelectric transducer excitation, yet it can also be used for electromagnetic acoustic transducer (EMAT) or capacitive micromachined ultrasonic transducers (CMUTs) excitation. Pulser can produce both single rectangular pulse and trains of rectangular arbitrary duration pulses. In order to achieve the economy of the electrical power consumption and speed both high-pulling and low-pulling elements are active switches. Energy per pulse was used to evaluate the amount of energy consumed. Two topologies were selected for evaluation: transformer output push–pull topology and half bridge output. Experimental investigation results are presented.

Characterization of Nanoscale Ultrasonic Transducer Elements as Effective Acoustical Devices

2016 ◽  
Vol 860 ◽  
pp. 35-40 ◽  
Author(s):  
Reshmi Maity ◽  
Niladri Pratap Maity ◽  
R.K. Thapa ◽  
S. Baishya
Keyword(s):  
Ultrasonic Transducer ◽  
Ultrasonic Transducers ◽  
Electrode Spacing ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Non Destructive Evaluation ◽  
Electrostatic Transducers ◽  
Gap Spacing ◽  
Non Destructive ◽  
Half Decade

The generation and detection of ultrasound in air has many applications in the field of ranging, non-destructive evaluation, microscopy and the most impactful in medical imaging. Conventional designs of electrostatic transducers have large electrode spacing of 50-100 μm which reduces the sensitivity of these capacitors. In the last one and a half decade silicon micromachining is used to define capacitors with gap spacing as small as 500Å, making it possible highly efficient capacitive micromachined ultrasonic transducers (CMUTs). In this paper a CMUT element is analytically characterized and FEM simulated. The observations are compared with published experimental results and excellent agreement is found between them.

Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8

2015 ◽  
Vol 645-646 ◽  
pp. 577-582 ◽  
Author(s):  
Yu Ping Li ◽  
Chang De He ◽  
Juan Ting Zhang ◽  
Jin Long Song ◽  
Wen Dong Zhang ◽  
...  
Keyword(s):  
Acoustic Impedance ◽  
Dynamic Range ◽  
Ultrasonic Transducer ◽  
High Sensitivity ◽  
Ultrasonic Field ◽  
Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Structure Simulation ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
The Relationship

In this paper, a new capacitive micromachined ultrasonic transducer (CMUT) is designed by using SU-8 material, and the theory of elastic thin plate is used to deduce the relationship between the pressure and capacitance of the structure. Simulation has been done about SU-8 CMUT by finite element method software ANSYS. The deformation of CMUT under acoustic pressure, the relationship between frequency, thickness and sensitivity, as well as the acoustic impedance and reflection coefficient of SU-8 material also have been studied through the simulation. The results turn out that SU-8 has the advantages of big dynamic range, high sensitivity and small acoustic impedance, so it has broad application in the ultrasonic field.

scholarly journals Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 421
Author(s):  
Jorge Oevermann ◽  
Peter Weber ◽  
Steffen H. Tretbar
Keyword(s):  
Data Security ◽  
Ultrasonic Transducers ◽  
Surrounding Tissue ◽  
Center Frequency ◽  
Medical Implants ◽  
Research Groups ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Polyether Ether Ketone ◽  
High Bandwidth ◽  
Ether Ketone

The aim of this work was to extend conventional medical implants by the possibility of communication between them. For reasons of data security and transmitting distances, this communication should be realized using ultrasound, which is generated and detected by capacitive micromachined ultrasonic transducers (CMUTs). These offer the advantage of an inherent high bandwidth and a high integration capability. To protect the surrounding tissue, it has to be encapsulated. In contrast to previous results of other research groups dealing with the encapsulation of CMUTs, the goal here is to integrate the CMUT into the housing of a medical implant. In this work, CMUTs were designed and fabricated for a center frequency of 2 MHz in water and experimentally tested on their characteristics for operation behind layers of Polyether ether ketone (PEEK) and titanium, two typical materials for the housings of medical implants. It could be shown that with silicone as a coupling layer it is possible to operate a CMUT behind the housing of an implant. Although it changes the characteristics of the CMUT, the setup is found to be well suited for communication between two transducers over a distance of at least 8 cm.

Capacitive micromachined ultrasonic transducers: Transmission evaluation with different membrane materials and dimensions

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Sudhanshu Tripathi ◽  
Rekha Agarwal ◽  
Rashmi Vashisth ◽  
Devraj Singh
Keyword(s):  
Resonant Frequency ◽  
Material Selection ◽  
Transmission Efficiency ◽  
Ultrasonic Transducers ◽  
Transduction Efficiency ◽  
Membrane Material ◽  
Structural Examination ◽  
Membrane Materials ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Output Pressure

Abstract Capacitive micromachined ultrasonic transducers (CMUTs) are dominant in generating and receiving acoustic signals. CMUT transmission efficiency solely depends upon the membrane material utilized. This work presents the structural examination of receiving and transmitting characteristics of CMUT with divergent membrane materials, namely Silicon (Si), Silicon Nitride ( Si 3 N 4 {\mathrm{Si}_{3}}{\text{N}_{4}} ), Indium Phosphide (InP), Zinc Oxide (ZnO), and Polysilicon (Poly-Si). The analysis includes the membrane deflection, pull-in voltage, output pressure, resonant frequency and capacitance modification with variable DC voltage. It has been found that InP gives the pull-in voltage comparable to Si in the receiving mode and have more transduction efficiency in transmitting mode. Effect of dimensions of CMUT on pull-in voltage and resonant frequency are also discussed. The major contribution lies in the analytical and estimation study of CMUT for appropriate membrane material selection meant for transmission and reception in the field of pressure sensing application.

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