The Vacancy Generation Influence on the Initial Stage of Ion Implantation

2015 ◽  
Vol 1097 ◽  
pp. 29-34
Author(s):  
E.S. Parfenova ◽  
Anna G. Knyazeva
Keyword(s):  
Surface Layer ◽  
Ion Implantation ◽  
Metal Surface ◽  
Impurity Concentration ◽  
Coupled Model ◽  
Irreversible Processes ◽  
Concentration Profiles ◽  
Thermodynamics Of Irreversible Processes ◽  
Vacancy Generation ◽  
Initial Stage

The coupled model is presented to describe the elements penetration into the surface layer of metal during the process of ion implantation. Mechanical stresses arising due to the interaction of particles with the surface affect the redistribution of the implanted impurity. In addition, the existence of vacancies in the metal surface and their generation under the stresses influence are taken into account. The kinetic law is written on the basis of the thermodynamics of irreversible processes. The solution had been found numerically. As a result, the distributions of impurity concentration and deformations have been obtained for various time moments. The comparison of the concentration profiles with vacancies and without their have been given.

scholarly journals Different shapes of impurity concentration profiles formed by long-range interstitial migration

2016 ◽  
Vol 05 (03) ◽  
pp. 1650014
Author(s):  
O. I. Velichko
Keyword(s):  
Low Temperature ◽  
Impurity Concentration ◽  
Annealing Duration ◽  
Average Lifetime ◽  
Concentration Profiles ◽  
Tail Region ◽  
Low Temperature Annealing ◽  
Straight Line ◽  
Initial Stage ◽  
Different Shapes

A model of interstitial impurity migration is proposed which explains the redistribution of ion-implanted boron in low-temperature annealing of nonamorphized silicon layers. It is supposed that nonequilibrium boron interstitials are generated either in the course of ion implantation or at the initial stage of thermal treatment and that they migrate inward and to the surface of a semiconductor in the basic stage of annealing. It is shown that the form of the “tail” in the boron profile with the logarithmic concentration axis changes from a straight line if the average lifetime of impurity interstitials is substantially shorter than the annealing duration to that bending upwards for increasing lifetime. The calculated impurity concentration profiles are in excellent agreement with the experimental data describing the redistribution of implanted boron for low-temperature annealing at 750[Formula: see text]C for 1[Formula: see text]h and at 800[Formula: see text]C for 35[Formula: see text]min. Simultaneously, the experimental phenomenon of incomplete electrical activation of boron atoms in the “tail” region is naturally explained.

Metal Surface Treatment with Particle Fluxes Taking into Account the Internal Boundary

2016 ◽  
Vol 685 ◽  
pp. 413-416 ◽  
Author(s):  
E.S. Parfenova ◽  
Anna G. Knyazeva
Keyword(s):  
Ion Implantation ◽  
Surface Treatment ◽  
Metal Surface ◽  
Internal Boundary ◽  
Model Parameters ◽  
Isothermal Model ◽  
Initial Stage ◽  
Before And After ◽  
Implantation Process ◽  
Particle Fluxes

In this paper, the isothermal model of the initial stage of ion implantation process taking into account internal boundary is presented. It is assumed that implantable impurity generates mechanical perturbations. These waves can propagate with different velocities before and after the border. The examples of the waveform evolution at transition across the boundary for different combinations of the model parameters are presented.

The Investigation on the Non-Contact Treatment of the Metal Surface Layer by Using Strong Pulse Electromagnetic Field

2011 ◽  
Vol 299-300 ◽  
pp. 65-68
Author(s):  
Ming Gao ◽  
Li Li Zhang ◽  
Tao Huang ◽  
Meng Ru Lv
Keyword(s):  
Electromagnetic Field ◽  
Surface Layer ◽  
Metal Surface ◽  
Recovery Process ◽  
Pulse Electromagnetic Field ◽  
Contact Method ◽  
Brass Surface ◽  
Metal Materials ◽  
Metal Surface Layer ◽  
Wood’S Alloy

A strong pulse electromagnetic field was employed to treat the surface layer of several metal materials. The results showed that the treatment of the strong pulse electromagnetic field could modify the microstructure of the region around the crack on the 45# steel surface. It could also make the recovery process occur in the scratch on the brass surface, and make the surface layer of the Wood’s alloy melt in a very shot time. These results indicated that the strong electromagnetic pulse could be developed as an effective non-contact method for the metal surface processing.

scholarly journals Phenomenological Thermodynamics of Irreversible Processes

Entropy ◽  
2018 ◽  
Vol 20 (6) ◽  
pp. 479 ◽  
Author(s):  
Yongqi Wang ◽  
Kolumban Hutter
Keyword(s):  
Irreversible Processes ◽  
Thermodynamics Of Irreversible Processes

scholarly journals Numerical Simulation of Temperature Distribution in the Glass Fiber Epoxy Composites during Microwave Curing

2018 ◽  
Vol 206 ◽  
pp. 03001
Author(s):  
X Zhang ◽  
X L Chang ◽  
R L Ma ◽  
L Zhang ◽  
X D Chen ◽  
...  
Keyword(s):  
Temperature Distribution ◽  
Glass Fiber ◽  
Three Dimensional ◽  
Coupled Model ◽  
Curing Process ◽  
Epoxy Ring ◽  
Microwave Curing ◽  
Composite Ring ◽  
Initial Stage ◽  
Field Temperature

A three-dimensional coupled model of electromagnetic field, temperature field and curing degree field was established. Based on this model, the simulation of microwave curing process of glass fiber epoxy ring was realized, and the temperature distribution at different time was obtained. Numerical results indicate that the temperature difference within the composite ring is mainly formed in the initial stage during microwave curing.

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