Structural, Electrical and Optical Properties of Li-Doped ZnO Thin Films Influenced by Annealing Oxygen Pressure
2011 ◽
Vol 299-300
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pp. 530-533
Keyword(s):
Li-doped ZnO thin films were grown on quartz substrates by radio frequency magnetron sputtering and In-situ annealing. The structural, electrical and optical properties of Li-doped ZnO films strongly depend on the annealing oxygen pressure. XRD and AFM analysis indicate that the ZnO films possess a good crystallinity with c-axis orientation, uniform thickness and dense surface. Optical transmission spectra show a high transmittance (~85%) in the visible region. Hall measurement demonstrates that ZnO films have p-type conduction with a Hall mobility of 5.0 cm2/Vs, resistivity of 0.97Ωcm and carrier concentration of 1.60×1017cm-3when annealing oxygen pressure is 1Pa.
2011 ◽
Vol 306-307
◽
pp. 362-367
2014 ◽
Vol 292
◽
pp. 219-224
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2011 ◽
Vol 687
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pp. 667-672
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Keyword(s):
2007 ◽
Vol 40
(22)
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pp. 7041-7045
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Keyword(s):
2011 ◽
Vol 25
(20)
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pp. 2741-2749
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Keyword(s):
Keyword(s):
2011 ◽
Vol 257
(7)
◽
pp. 2731-2736
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Keyword(s):