Analysis of Surface Properties of Diamond-Like Carbon Films by a Sputtering Deposition

2013 ◽  
Vol 662 ◽  
pp. 505-510 ◽  
Author(s):  
Jium Fang ◽  
Maw Tyan Sheen ◽  
Ming Der Jean
Keyword(s):  
Photoelectron Spectroscopy ◽  
Fuzzy Inference ◽  
Carbon Films ◽  
Experimental Results ◽  
Wear Volume ◽  
Diamond Like Carbon ◽  
Sputtering Deposition ◽  
Tribological Behaviors ◽  
Predicted Values ◽  
Inference Systems

A new approach with adaptive network-based fuzzy inference systems (ANFIS) based on experimental designs was used to model and characterize the tribological behaviors of diamond-like carbon (DLC) films deposited by a magnetron sputtering system. An orthogonal array experiment was introduced and the effects of deposited parameters on the films were systematically explored. The films were analyzed by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). In this study, a group of highly developed hillock-like textures appeared and a lower wear volume loss became visible in the DLC films. Furthermore, the predicted values and experimental results, in which the ANFIS effectively predicts the tribological behaviors of the DLC films, are similar. It was experimentally confirmed the ANFIS predictions agreed with the experiments. Therefore, the experimental results demonstrate the tribological properties on DLC multilayer films are accurately predicted by ANFIS, thereby justifying the reliability and feasibility of the approach.

The Structure and Electrical Property of sp2 Rich Carbon Films by Magnetron Sputtering

2014 ◽  
Vol 998-999 ◽  
pp. 120-123
Author(s):  
Jun Du ◽  
Xiao Ying Zhu ◽  
Yan Zang ◽  
Lei Guo
Keyword(s):  
Electrical Resistivity ◽  
Magnetron Sputtering ◽  
Carbon Films ◽  
Wear Volume ◽  
Chemical Bonds ◽  
Micro Hardness ◽  
X Ray Diffraction ◽  
Sputtering Deposition ◽  
X Ray ◽  
Pin On Disk

sp2 rich carbon films were produced by using magnetron sputtering deposition. The hardness, friction coefficient and wear volume were elevated by Knoop micro-hardness and pin-on-disk tester; The composition and microstructure of the carbon films have been characterized in detail by combining the techniques of Rutherford Backscattering Spectrum (RBS), X-Ray Photoelectron Spectrum (XPS) and X-Ray Diffraction (XRD); the electrical resistivity was measured by Four Probe Methods (FPM). It is found that: the films hardness are 11~17GPa (HK0.05), the friction coefficients are 0.1-0.2, the wear rate is 10-15m3/Nm; The maximum intensity position in the C1s indicates the chemical bonds are mainly sp2; the electrical resistivity is 1~2×10-4Ω·m. XRD proves these carbon films are amorphous.

A study for anticorrosion and tribological behaviors of thin/thick diamond-like carbon films in seawater

2018 ◽  
Vol 6 (1) ◽  
pp. 014004 ◽  
Author(s):  
Yuwei Ye ◽  
Shujuan Jia ◽  
Dawei Zhang ◽  
Wei Liu ◽  
Haichao Zhao
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Tribological Behaviors

OPTICAL AND STRUCTURAL PROPERTIES OF NITROGENATED DIAMOND-LIKE CARBON FILMS PREPARED BY r.f. PECVD

2006 ◽  
Vol 13 (01) ◽  
pp. 1-6 ◽  
Author(s):  
M. RUSOP ◽  
S. ABDULLAH ◽  
J. PODDER ◽  
T. SOGA ◽  
T. JIMBO
Keyword(s):  
Photoelectron Spectroscopy ◽  
Uv Spectroscopy ◽  
Nitrogen Concentration ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Considerable Effect ◽  
Wave Number ◽  
Diamond Like Carbon ◽  
P Type ◽  
Deposited Films

Nitrogenated diamond-like carbon films have been deposited on glass and p-type Si (100) substrates by radio frequency (r.f.) plasma-enhanced chemical vapor deposition (PECVD) with a frequency of 13.56 MHz at room temperature using CH 4 as precursor of carbon source and H 2 as a carrier gas. The deposition was performed at a different flow rate of nitrogen from 0 to 12 sccm under a constant r.f. power. The effect of nitrogen incorporation on the bonding states and growth kinetics of the deposited films have been investigated by Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, X-ray photoelectron spectroscopy and optical properties by UV spectroscopy measurement. Our experimental results show that the incorporation of nitrogen has a considerable effect on the properties of the deposited films. FTIR spectra show that the nitrogen is bonded to carbon and hydrogen as C=N , C≡N , N–H and C–H bonding configurations in the as-deposited film. The incorporation of nitrogen is found to shift the Raman G peak toward the higher wave number and to increase the Raman I D /I G ratio demonstrating the graphitic character of the hydrogenated amorphous carbon–nitrogen films. Band gap is found to reduce with the increase in nitrogen concentration.

Photoelectron Spectroscopy Characterization of Diamond-like Carbon Films

2006 ◽  
Vol 60 (8) ◽  
pp. 936-940 ◽  
Author(s):  
K. Mašek ◽  
S. Fabík ◽  
A. Mašková ◽  
N. Tsud ◽  
K. Veltruská ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Carbon Films ◽  
Diamond Like Carbon

The Biocompatibility of Ti Alloy Improved by Nitrogen-Doped Diamond-Like Carbon Films

2014 ◽  
Vol 711 ◽  
pp. 250-254 ◽  
Author(s):  
Wufanbieke Baheti ◽  
Ming Xin Li ◽  
Fu Guo Wang ◽  
Jin Ge Song ◽  
Long Hua Xu ◽  
...  
Keyword(s):  
Contact Angle ◽  
Photoelectron Spectroscopy ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Measuring Device ◽  
Nitrogen Doped ◽  
Angle Measuring ◽  
N Doping

The nitrogen-doped diamond-like carbon film was prepared on Ti6Al4V alloy by using plasma enhanced chemical vapor deposition (PECVD) technique,and its biocompatibility was studied.The surface morphology,chemical composition and contact angle were measured by scanning electron microscope (SEM),X-ray photoelectron spectroscopy(XPS),Raman Spectrometer and contact angle measuring device. Finally, the proliferation rate and cellular morphology of 3T3-E1 osteoblast cells on different sample surfaces were tested and Image J software was used to statistically analyze the count of the adhered cells. The results showed that cell adhesion and proliferation were significantly (P<0.05) increased on nitrogen-doped diamond-like carbon films , which illustrated that N doping improved the biocompatibility of DLC films. This finding has potential clinical application value to modify titanium alloy for new bone formation.

scholarly journals Influence of Third Particle on the Tribological Behaviors of Diamond-like Carbon Films

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Lichun Bai ◽  
Narasimalu Srikanth ◽  
Guozheng Kang ◽  
Kun Zhou
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Tribological Behaviors

Nanostructure Evolution and Optical Properties of Silver Doped Diamond Like Carbon Thin Film on Soft Polymer

2018 ◽  
Vol 24 (8) ◽  
pp. 5731-5736 ◽  
Author(s):  
Md. Shahbaz Alam ◽  
Chandan Kumar Ghosh ◽  
Nillohit Mukherjee ◽  
Sk. Faruque Ahmed
Keyword(s):  
Optical Properties ◽  
Photoelectron Spectroscopy ◽  
Strain Energy ◽  
Elastic Moduli ◽  
Optical Band Gap ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Spectroscopy Analysis ◽  
X Ray ◽  
Soft Polymer

Effect of silver doping on nanostructure evolution and optical properties of diamond like carbon films synthesized on elastomeric polymer of poly-dimenthylsiloxane (PDMS) and silicon substrate via radio frequency reactive sputtering technique were studied in detail. Due to difference in elastic moduli of PDMS substrate and silver doped diamond like carbon (Ag:DLC) films, a well-defined nanostructure wrinkle pattern have formed on PDMS for releasing the strain energy induced by residually compressed stress in Ag:DLC film. X-ray photoelectron spectroscopy analysis revealed the different bonding information between silver and carbon and the chemical composition of the Ag:DLC films. The introduction of silver in the DLC matrix, decreased the optical transparency as well as the optical band gap from 3.97 to 3.25 eV with a variation of Ag at.% from 0 to 9.2 in the films. The Urbach parameter calculated from the transmitance data, increased with the increase of the Ag doping percentage.

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