OPTICAL AND STRUCTURAL PROPERTIES OF NITROGENATED DIAMOND-LIKE CARBON FILMS PREPARED BY r.f. PECVD

2006 ◽  
Vol 13 (01) ◽  
pp. 1-6 ◽  
Author(s):  
M. RUSOP ◽  
S. ABDULLAH ◽  
J. PODDER ◽  
T. SOGA ◽  
T. JIMBO
Keyword(s):  
Photoelectron Spectroscopy ◽  
Uv Spectroscopy ◽  
Nitrogen Concentration ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Considerable Effect ◽  
Wave Number ◽  
Diamond Like Carbon ◽  
P Type ◽  
Deposited Films

Nitrogenated diamond-like carbon films have been deposited on glass and p-type Si (100) substrates by radio frequency (r.f.) plasma-enhanced chemical vapor deposition (PECVD) with a frequency of 13.56 MHz at room temperature using CH 4 as precursor of carbon source and H 2 as a carrier gas. The deposition was performed at a different flow rate of nitrogen from 0 to 12 sccm under a constant r.f. power. The effect of nitrogen incorporation on the bonding states and growth kinetics of the deposited films have been investigated by Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, X-ray photoelectron spectroscopy and optical properties by UV spectroscopy measurement. Our experimental results show that the incorporation of nitrogen has a considerable effect on the properties of the deposited films. FTIR spectra show that the nitrogen is bonded to carbon and hydrogen as C=N , C≡N , N–H and C–H bonding configurations in the as-deposited film. The incorporation of nitrogen is found to shift the Raman G peak toward the higher wave number and to increase the Raman I D /I G ratio demonstrating the graphitic character of the hydrogenated amorphous carbon–nitrogen films. Band gap is found to reduce with the increase in nitrogen concentration.

STRUCTURAL AND OPTICAL CHARACTERIZATION OF BORON–NITROGEN-DOPED AMORPHOUS CARBON FILMS DEPOSITED BY r.f. PECVD

2007 ◽  
Vol 21 (08) ◽  
pp. 455-466 ◽  
Author(s):  
J. PODDER ◽  
M. RUSOP ◽  
T. SOGA ◽  
T. JIMBO
Keyword(s):  
Amorphous Carbon ◽  
Photoelectron Spectroscopy ◽  
Nitrogen Concentration ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Film Deposition ◽  
Wave Number ◽  
Nitrogen Doped ◽  
Deposited Films ◽  
Boron Nitrogen

Boron–nitrogen-doped amorphous carbon (a-C:H:B:N) films have been deposited onto glass and n-type Si(100) substrates by radio frequency (r.f.) plasma-enhanced chemical vapor deposition at a frequency of 13.56 MHz at room temperature using CH 4 as precursor of carbon source and H2 as a carrier gas. The film deposition was performed in the presence of crystalline boron source at different flow rates of 0, 6, 8, 10, 12 sccm of nitrogen under constant r.f. power and fixed partial pressure of mixed CH 4, N 2, and H 2 gases. Effects of boron and nitrogen doping on the bonding states, growth kinetics and optical properties of the as-deposited films have been examined by Fourier transform infrared (FTIR) spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and ultraviolet-visible spectroscopy. The experimental results show that the incorporation of boron and nitrogen has a considerable effect on the properties of the deposited films. FTIR spectra show that the nitrogen is bonded to carbon and hydrogen as C=N , N–H and C–H bonding configurations in the as-deposited film. The incorporation of boron and nitrogen shifts the G-peak towards the higher wave number and an increase in the I D /I G ratio demonstrating the graphitic character of the a-C:H:B:N films. Optical band gap is found to be reduced from 1.62 to 1.35 eV with the increase in nitrogen concentration in the presence of boron.

The Biocompatibility of Ti Alloy Improved by Nitrogen-Doped Diamond-Like Carbon Films

2014 ◽  
Vol 711 ◽  
pp. 250-254 ◽  
Author(s):  
Wufanbieke Baheti ◽  
Ming Xin Li ◽  
Fu Guo Wang ◽  
Jin Ge Song ◽  
Long Hua Xu ◽  
...  
Keyword(s):  
Contact Angle ◽  
Photoelectron Spectroscopy ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Measuring Device ◽  
Nitrogen Doped ◽  
Angle Measuring ◽  
N Doping

The nitrogen-doped diamond-like carbon film was prepared on Ti6Al4V alloy by using plasma enhanced chemical vapor deposition (PECVD) technique,and its biocompatibility was studied.The surface morphology,chemical composition and contact angle were measured by scanning electron microscope (SEM),X-ray photoelectron spectroscopy(XPS),Raman Spectrometer and contact angle measuring device. Finally, the proliferation rate and cellular morphology of 3T3-E1 osteoblast cells on different sample surfaces were tested and Image J software was used to statistically analyze the count of the adhered cells. The results showed that cell adhesion and proliferation were significantly (P<0.05) increased on nitrogen-doped diamond-like carbon films , which illustrated that N doping improved the biocompatibility of DLC films. This finding has potential clinical application value to modify titanium alloy for new bone formation.

Nitrogen (N2) Implantation to Suppress Growth of Interfacial Oxide in Mocvd Bst and Sputtered Bst Films

1999 ◽  
Vol 567 ◽  
Author(s):  
Renee Nieh ◽  
Wen-Jie Qi ◽  
Yongjoo Jeon ◽  
Byoung Hun Lee ◽  
Aaron Lucas ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Interfacial Layer ◽  
Gate Dielectric ◽  
Nitrogen Concentration ◽  
Chemical Vapor ◽  
Future Generation ◽  
Oxide Thickness ◽  
Layer Growth ◽  
X Ray ◽  
Bst Films

ABSTRACTBa0.5Sr0.5TiO3 (BST) is one of the high-k candidates for replacing SiO2 as the gate dielectric in future generation devices. The biggest obstacle to scaling the equivalent oxide thickness (EOT) of BST is an interfacial layer, SixOy, which forms between BST and Si. Nitrogen (N2) implantation into the Si substrate has been proposed to reduce the growth of this interfacial layer. In this study, capacitors (Pt/BST/Si) were fabricated by depositing thin BST films (50Å) onto N2 implanted Si in order to evaluate the effects of implant dose and annealing conditions on EOT. It was found that N2 implantation reduced the EOT of RF magnetron sputtered and Metal Oxide Chemical Vapor Deposition (MOCVD) BST films by ∼20% and ∼33%, respectively. For sputtered BST, an implant dose of 1×1014cm−;2 provided sufficient nitrogen concentration without residual implant damage after annealing. X-ray photoelectron spectroscopy data confirmed that the reduction in EOT is due to a reduction in the interfacial layer growth. X-ray diffraction spectra revealed typical polycrystalline structure with (111) and (200) preferential orientations for both films. Leakage for these 50Å BST films is on the order of 10−8 to 10−5 A/cm2—lower than oxynitrides with comparable EOTs.

Surface studies of diamond-like carbon films grown by plasma-enhanced chemical vapor deposition

2010 ◽  
Vol 42 (12-13) ◽  
pp. 1702-1705 ◽  
Author(s):  
R. Maheswaran ◽  
R. Sivaraman ◽  
O. Mahapatra ◽  
P. C. Rao ◽  
C. Gopalakrishnan ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Surface Studies

Analysis of Surface Properties of Diamond-Like Carbon Films by a Sputtering Deposition

2013 ◽  
Vol 662 ◽  
pp. 505-510 ◽  
Author(s):  
Jium Fang ◽  
Maw Tyan Sheen ◽  
Ming Der Jean
Keyword(s):  
Photoelectron Spectroscopy ◽  
Fuzzy Inference ◽  
Carbon Films ◽  
Experimental Results ◽  
Wear Volume ◽  
Diamond Like Carbon ◽  
Sputtering Deposition ◽  
Tribological Behaviors ◽  
Predicted Values ◽  
Inference Systems

A new approach with adaptive network-based fuzzy inference systems (ANFIS) based on experimental designs was used to model and characterize the tribological behaviors of diamond-like carbon (DLC) films deposited by a magnetron sputtering system. An orthogonal array experiment was introduced and the effects of deposited parameters on the films were systematically explored. The films were analyzed by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). In this study, a group of highly developed hillock-like textures appeared and a lower wear volume loss became visible in the DLC films. Furthermore, the predicted values and experimental results, in which the ANFIS effectively predicts the tribological behaviors of the DLC films, are similar. It was experimentally confirmed the ANFIS predictions agreed with the experiments. Therefore, the experimental results demonstrate the tribological properties on DLC multilayer films are accurately predicted by ANFIS, thereby justifying the reliability and feasibility of the approach.

Formation of Diamond-Like Carbon Films by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Deposition

2013 ◽  
Vol 52 (11R) ◽  
pp. 110123 ◽  
Author(s):  
Meng Yang ◽  
Susumu Takabayashi ◽  
Shuichi Ogawa ◽  
Hiroyuki Hayashi ◽  
Radek Ješko ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon

Synthesis of diamond-like carbon films on Si substrates by photoemission-assisted plasma-enhanced chemical vapor deposition

2012 ◽  
Vol 523 ◽  
pp. 25-28 ◽  
Author(s):  
Meng Yang ◽  
Shuichi Ogawa ◽  
Susumu Takabayashi ◽  
Taiichi Otsuji ◽  
Yuji Takakuwa
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Si Substrates
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