Laser Interference Nanolithography with a 405nm Fiber Semiconductor Laser

2013 ◽  
Vol 552 ◽  
pp. 262-267 ◽  
Author(s):  
Jia Xu ◽  
Zuo Bin Wang ◽  
Zhan Kun Weng ◽  
Zhi Ming Li ◽  
Xiao Juan Sun ◽  
...  
Keyword(s):  
Semiconductor Laser ◽  
Low Cost ◽  
Exposure Dose ◽  
Surface Pattern ◽  
Laser Interference ◽  
Feature Size ◽  
Nano Fabrication ◽  
Pattern Structures ◽  
Environmental Variations ◽  
Surface Patterns

This paper presents a method of laser interference nanolithography for the formation of interference patterns on the resist using a fiber semiconductor laser with a wavelength of 405nm. In the method, surface pattern structures are fabricated through the control of the incident angles of two interfering beams, the exposure dose of laser radiation and the development time. The angle adjustment becomes more convenient and the influence of environmental variations on the system has been reduced due to the use of fiber optic components. In the work, a feature size of down to 63nm and a pattern period of 215nm were achieved. The experimental results have shown that the method can be used for low cost micro and nano fabrication of periodical surface patterns with the features of low cost, simplicity and flexibility.

Micro- and Nano-Fabrication of Polymer Based Microfluidic Platforms for BioMEMS Applications

2002 ◽  
Vol 729 ◽  
Author(s):  
Siyi Lai ◽  
L. James Lee ◽  
Liyong Yu ◽  
Kurt W. Koelling ◽  
Marc J. Madou
Keyword(s):  
Low Cost ◽  
Gas Injection ◽  
Surface Characteristics ◽  
Tissue Growth ◽  
Thin Layers ◽  
Microfluidic Platforms ◽  
Precision Motion Control ◽  
Nano Fabrication ◽  
Local Modification ◽  
Precision Motion

AbstractIn this paper, we review the approaches developed in our laboratory for polymer-based micro/nanofabrication. For fabrication of microscale features, UV-LIGA (UV-lithography, electroplating, and molding) technology was applied for low-cost mass production. For fabrication of sub-micron or nanoscale features, a novel nano-manufacturing protocol is being developed. The protocol applies a novel nano-lithography imprinting process on an ultra-precision motion-control station. It is capable of economically producing well-defined pores or channels at the nanometer scale on thin polymer layers. The formed thin layers can be used as nano-filters for chemical or bio-separation. They can also be integrated into miniaturized devices for cell immunoprotection or tissue growth. For bonding of polymer-based microfluidic platforms, a novel resin-gas injection-assisted technique has been developed that achieves both bonding and surface modification. This new approach can easily seal microfluidic devices with micron and sub-micron sized channels without blocking the flow path. It can also be used to modify the channel shape, size, and surface characteristics (e.g., hydrophilicity, degree of protein adsorption). By applying the masking technique, local modification of the channel surface can be achieved through cascade resin-gas injection.

Laser interference ablation by ultrashort UV laser pulses via diffractive beam management

2020 ◽  
Vol 9 (1-2) ◽  
pp. 41-52 ◽  
Author(s):  
Jan-Hendrik Klein-Wiele ◽  
Andreas Blumenstein ◽  
Peter Simon ◽  
Jürgen Ihlemann
Keyword(s):  
Laser Pulses ◽  
Diffractive Optical Elements ◽  
Uv Laser ◽  
Laser Interference ◽  
Periodic Patterns ◽  
Optical Elements ◽  
Periodic Surface ◽  
Coherent Beams ◽  
Surface Patterns ◽  
Computer Generated Holograms

AbstractThe fabrication of periodic surface patterns on various materials by ultrashort ultraviolet (UV) laser pulses is reviewed. Laser interference ablation using two or more coherent beams leads to deterministic, strictly periodic patterns. The generation of the interfering beams is accomplished by diffractive optical elements like gratings, grating systems or computer-generated holograms. The recombination of the diffracted beams is performed by optical imaging or diffractive beam management. Ultrashort UV pulses are especially suited for generating micron- to submicron-sized deterministic periodic patterns on metals and semiconductors.

Fabrication of Nano-Electromechanical Structures Down to 20 nm by Spacer Technology

2007 ◽  
Author(s):  
Xiang Han ◽  
Ling Xia ◽  
Wengang Wu ◽  
Guizhen Yan ◽  
Jun Xu ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Mechanical Vibration ◽  
Cantilever Beams ◽  
Fabrication Method ◽  
Feature Size ◽  
Plasma Damage ◽  
Nano Fabrication ◽  
Nano Structures ◽  
20 Nm ◽  
Deposited Film

Spacer technology has been developed to fabricate nano-structures for NEMS application. It provides a parallel nano-fabrication method with double or quadplex device density at a certain lithography node. By controlling the deposited film thickness, the feature size of the SiO2 spacer hard mask is reduced down to 35 nm. After the spacer pattern is transferred to Si, a precise thermal oxidation is performed to improve the profile and reduce the plasma damage. Finally, sublimation or HF vapor phase etching is introduced to release the nano-structures according to different structure dimensions. As a result, with better surface morphology, suspended Si nano-beams with a width of 20 nm are obtained. Actuated by mechanical vibration and electrostatic forces, vibrations of the obtained cantilever beams and fixed-fixed beams are observed in SEM. In addition, a metallic nano-nozzle with a diameter of 140 nm is established by electroless plating around the suspended Si nano-beam served as a mold. As a development of the spacer technology, nano-needle array is demonstrated at the cross points of crossed SiO2 spacers by anisotropic etching. The diameters of the hybridized nano-needles are 300 nm so far and can be further reduced by smaller spacer dimension.

Surface Replication and Structural Development in Micromolding for Micro/Nanocomposites

2007 ◽  
Author(s):  
H. Ito ◽  
K. Kazama ◽  
T. Kikutani
Keyword(s):  
Laser Scanning ◽  
Hexagonal Boron Nitride ◽  
Laser Scanning Microscopy ◽  
Surface Pattern ◽  
Confocal Laser ◽  
Order Structure ◽  
Structural Development ◽  
Molded Parts ◽  
Surface Patterns ◽  
Micro Features

Micromolding with micro-scale surface features of hexagonal boron nitride (h-BN) / polypropylene (PP) composites with different h-BN component was performed to improve molded parts’ heat diffusivity and processability. Effects of h-BN content and process parameters on processability, higher-order structure, and microscale surface patterns of molded parts were analyzed using SEM, WAXD, SPM, and confocal laser scanning microscopy. The replication ratio of the microscale surface pattern and flow length of composite molded parts was improved by compounding the h-BN filler. The replication ratio of the microscale surface pattern near the flow end became greater than 1.0 because of deformation of surface patterns during de-molding. The replication ratio and shape of surface patterns of molded parts were improved with the increase of the h-BN component. The h-BN platelet oriented inside surface micro-features; skin-shear-core structures were well observed in the molded parts.

Surface Patterning of Stainless Steel in Prevention of Fouling in Heat Transfer Equipment

2013 ◽  
Vol 762 ◽  
pp. 493-500 ◽  
Author(s):  
Tiina M. Pääkkönen ◽  
Ulla Ojaniemi ◽  
Markus Riihimäki ◽  
Esa Muurinen ◽  
Carey J. Simonson ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Stainless Steel ◽  
Thermal Conditions ◽  
Surface Patterning ◽  
Surface Pattern ◽  
Stainless Steel Surface ◽  
Cfd Modelling ◽  
Carbonate Solutions ◽  
Wide Range ◽  
Surface Patterns

Fouling of surfaces is a major challenge in design and operation of many industrial heat transfer equipment. Fouling causes significant energy, material and production losses, which increase the environmental impact and decrease economic profitability of processes. Even small improvements in prevention of fouling would lead to significant savings in a wide range of heat transfer applications. In this study, crystallization fouling of aqueous calcium carbonate solutions on a heated stainless steel surface is used to investigate the prevention of fouling in heat transfer equipment by physical surface modifications. Fouling behaviour of different surface patterns are studied experimentally in a laboratory scale fouling test apparatus. CFD modelling is used to study hydrodynamic and thermal conditions near surfaces with different patterns. In addition, the effect of surface pattern on the removal of particles is studied numerically. Surface patterning is found to affect the hydrodynamic and thermal conditions near the wall, and therefore to change the conditions for fouling layer build-up and removal, when compared to a flat heat transfer surface. The most promising surface pattern includes curved shapes, and it seems to create flow conditions in which improved convective heat transfer decreases the driving force for crystallization fouling. In addition, curved surfaces increase the shear forces at the wall, which prevents adhesion of the foulants to the surface and increases resuspension.

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