Study on Shock Resistance of MEMS Devices with Different Stoppers

2014 ◽  
Vol 609-610 ◽  
pp. 825-830 ◽  
Author(s):  
Tao Jiang ◽  
Yun Wei ◽  
Sai Yao ◽  
Jian Zhou
Keyword(s):  
Design Methodology ◽  
Design Method ◽  
Mems Devices ◽  
Dynamics Model ◽  
Reliability Design ◽  
Traditional Design ◽  
Sharp Stress ◽  
Shock Resistance ◽  
Mems Device ◽  
Shock Environment

The shock resistance of the MEMS device can be improved by simplifying its structure, but it will reduce accuracy. A commonly implemented solution that strengthens the shock resistance is the use of stopper. However, the collision between MEMS structure and stopper in shock environment may lead to the failure of the device. Hence, stopper should have a fine protection performance. In this study, the design method and principle of the MEMS device in the shock environment were analyzed. It was pointed out that the reliability design methodology of the MEMS device based on statics theory was insufficient. Next, the response of MEMS device to shock was studied and the shock dynamics model was established. Based on the model, the shock response of the traditional design and designs with different stoppers were analyzed. At last, experiments were carried out and the protection performance of different stoppers was evaluated. Results show that the use of stopper can obviously improve the shock resistance of the device. Elastic stopper can strengthen the shock resistance of the device greatly because of the excellent protection ability, while hard stopper may cause the emergence of the sharp stress wave.

Study on Designs of Stoppers for MEMS Devices in Shock Environment

2012 ◽  
Vol 184-185 ◽  
pp. 510-515 ◽  
Author(s):  
Tao Jiang ◽  
Jian Zhou ◽  
Fei Feng
Keyword(s):  
Stress Wave ◽  
Mems Devices ◽  
Dynamics Model ◽  
Reliability Design ◽  
Traditional Design ◽  
Sharp Stress ◽  
Shock Dynamics ◽  
Shock Resistance ◽  
Shock Environment

Stoppers are commonly used to improve the shock resistance of MEMS devices. However, the collision between MEMS structure and stoppers in shock environment may lead to emergence of the stress wave, resulting in the failure of devices. Therefore, MEMS devices designed based on current statics theory is unreliable. After analyzing the method and principle for MEMS reliability design, the shock dynamics model was established. Based on the model, the response of the traditional design and designs with different stoppers to shock was researched. At last, protection performances of different stoppers were evaluated. Results showed that the use of stoppers could improve the shock resistance of the device obviously, but hard stoppers would cause to the emergence of the sharp stress wave. Elastic stoppers had excellent protection ability which could strengthen the shock resistance of the device greatly.

scholarly journals Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm

2022 ◽  
Vol 8 (1) ◽  
Author(s):  
Chen Wang ◽  
Yuan Wang ◽  
Weidong Fang ◽  
Xiaoxiao Song ◽  
Aojie Quan ◽  
...  
Keyword(s):  
Genetic Algorithm ◽  
Human Hair ◽  
Design Methodology ◽  
Large Range ◽  
Design Method ◽  
Actuation Voltage ◽  
Superior Performance ◽  
Mems Devices ◽  
Electrostatically Actuated ◽  
Fabrication Tolerances

AbstractThis paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries designed by a genetic algorithm significantly improves the performance of the microgripper. An experiment shows that the designed microgripper has a large displacement (91.5 μm) with a low actuation voltage (47.5 V), which agrees well with the theory. The microgripper has a large actuation displacement and can handle micro-objects with a size from 10 to 100 μm. A grasping experiment on human hair with a diameter of 77 μm was performed to prove the functionality of the gripper. The result confirmed the superior performance of the new design methodology enabling freeform geometries. This design method can also be extended to the design of many other MEMS devices.

New Progress Concerning Research of Product Design Theory and Methods

2011 ◽  
Vol 121-126 ◽  
pp. 692-700
Author(s):  
Bang Chun Wen ◽  
Xiao Peng Li ◽  
Zong Yan Wang
Keyword(s):  
Product Design ◽  
Design Theory ◽  
Design Methodology ◽  
Deep Layer ◽  
Design Method ◽  
Green Design ◽  
Synthesis Design ◽  
Traditional Design ◽  
Set Up

The product design theory and methods based on “the Scientific Outlook on Development” have been set up by our group in recent 10 years, The new progress concerning Research of product design theory and methods include: 1) QCTES was instead of IQCTES including six requirements of product design; 2) traditional design stages were replaced with four new stages including investigation, planning, implement and inspection; 3) green design was replaced with harmonious design; 4) traditional design method was replaced with deep-layer design method; 5) concept and connotation of product top-layer design were proposed; 6) more detailed contents of product synthesis design method were advanced. We got good effects to apply above product design methodology on many product designs recent years.

MEMS Aided Design Method Based on 3D Features

2010 ◽  
Vol 29-32 ◽  
pp. 2302-2307
Author(s):  
Chang Fu Zhang ◽  
Li Juan Wang
Keyword(s):  
Success Rate ◽  
Design Method ◽  
Design System ◽  
Mems Devices ◽  
Improve Design ◽  
Traditional Design ◽  
Design Cycle ◽  
Aided Design ◽  
Process Complexity ◽  
Feature Database

A new design method for surface micromachined devices is proposed to reduce process complexity and improve intuitiveness of traditional design method of mask-to-shape-to-function. In the method, solid geometric models of MEMS devices are efficiently built up by selecting 3D features from the established MEMS feature database. Mask and process flow can be automatically generated with the developed aided design system based on SolidWorks. A practical example shows that the design method can shorten design cycle and improve design success rate.

Feature-Based Geometric Modeling Approach to Surface Micromachined MEMS

2004 ◽  
Author(s):  
Feng Gao ◽  
Steve Y. Hong ◽  
David W. Rosen
Keyword(s):  
Geometric Modeling ◽  
Design Methodology ◽  
Design Method ◽  
Geometric Model ◽  
3D Models ◽  
Geometric Design ◽  
Geometric Constraints ◽  
Mems Devices ◽  
Visual Evaluation ◽  
Feature Based

Geometric modeling is an important aspect of MEMS design. It not only creates geometric models for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design methodology that enables designers to create fabrication-ready 3D models of MEMS devices without concerning the mask layout. Compared with the present geometric design routine, which builds 3D device models through simulating the fabrication process from the photolithography masks, the function-oriented geometric design method allows designers to establish 3D models by using a set of pre-defined volumetric primitives associated with geometric constraints. The fabrication information is derived from the corresponding function-oriented data specified by designers. Hence, designers are released from the down-stream fabrication planning, and can focus on creative design. This research is the application of feature modeling and constraint-based design to the micro world. The workbench of this system is developed on the geometric model kernel ACIS.

New Developments of Product Design Methodology

2011 ◽  
Vol 308-310 ◽  
pp. 146-156 ◽  
Author(s):  
Bang Chun Wen ◽  
Xue Jun Wang ◽  
Ji Shuang Dai ◽  
Xing Guo Ma ◽  
Zhao Hui Ren ◽  
...  
Keyword(s):  
Research And Development ◽  
Product Design ◽  
Design Methodology ◽  
Design Research ◽  
Design Method ◽  
Systematic Design ◽  
Design Quality ◽  
New Developments ◽  
Traditional Design ◽  
Set Up

Design and R&D (Research and Development) of products play an important role in development and competitiveness of enterprise. How to do the works better? We think that most advanced product design methodology should be used on design, research and development of products. So-called most advanced product design methodology is that based on “the Scientific Outlook on Development” that we set up recent years. New developments of product design methodology include: At first it has been classified that more than seventy theories and methods proposed by domestic and overseas scholars in recent 100 years; QCTES was instead of IQCTES including six requirements of product design; traditional design stages were replaced with four new stages including investigation, planning, implement and inspection; green design was replaced with harmonious design; traditional design method was replaced with deep-layer design method; concept and connotation of product top-layer design were proposed; more detailed contents of product systematic design were advanced; formulas of complete system and product design quality, and connection equation between design objective, design content and design method were submitted. We got good effects to apply above product design methodology on many product designs recent years.

The Analysis on Manufacture Cost of Fire Robot Based on Modular Design

2014 ◽  
Vol 716-717 ◽  
pp. 1518-1521
Author(s):  
Shu Fang ◽  
Yan Xu ◽  
Fei Dong
Keyword(s):  
Modular Design ◽  
Design Method ◽  
Working Environment ◽  
Activity Based Costing ◽  
Traditional Design ◽  
Different Types ◽  
Function Modules ◽  
Flexible Manufacture ◽  
Technical Platform ◽  
General Technical

The manufacture of fire robot has characteristics such as different types and piece production, and flexible manufacture and cost control of the fire robot must be considered due to these characteristics. In this paper, the similarity of fire robot’s working environment was analyzed, The demand of chassis’s adaptability and the method using general technical platform were discussed with the thinking of modular design, and new series fire robots which composed of the general platform and different function modules were proposed, and the manufacture cost of traditional design method and modular design method were compared in using the activity-based costing method, and under the new design method the manufacture cost were decreased extremely.

scholarly journals Designing in Architecture: Behavioral Approach Methodology

2018 ◽  
Vol 7 (3.27) ◽  
pp. 142
Author(s):  
Sri Astuti Indriyati ◽  
. .
Keyword(s):  
Human Behavior ◽  
Architectural Design ◽  
Design Methodology ◽  
Design Method ◽  
Coping Behavior ◽  
Behavioral Approach ◽  
Employee Productivity ◽  
Specific Design ◽  
New Guidelines

A fundamental premise on environmental and behavioral fields involves assumptions about the systematic interrelationships between architecture and patterns of human behavior. The case study conducted was to confirm the needs of specific design methodology in relations to the area of Perception and Human Behavior. The research focused to the extent to which Office Space Performance gives impact on Employee Productivity and Satisfaction. Following that, It was also seen how those affect the behavior of coping. The findings show that there is a significant impact of Spaces’ Performances on Space Satisfaction. Further, there is a significant impact of Space Satisfaction on Coping Behavior and also a significant impact of Spaces’ Performances against Coping behavior. Humanist architecture with architectural behavior approach is required as a Concept of Planning and Architectural Design in the Future. A New Guidelines for Planning and Architectural Design Method for Architectural Design with Behavior concerns is proposed.   

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