Feature-Based Geometric Modeling Approach to Surface Micromachined MEMS

2004 ◽  
Author(s):  
Feng Gao ◽  
Steve Y. Hong ◽  
David W. Rosen
Keyword(s):  
Geometric Modeling ◽  
Design Methodology ◽  
Design Method ◽  
Geometric Model ◽  
3D Models ◽  
Geometric Design ◽  
Geometric Constraints ◽  
Mems Devices ◽  
Visual Evaluation ◽  
Feature Based

Geometric modeling is an important aspect of MEMS design. It not only creates geometric models for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design methodology that enables designers to create fabrication-ready 3D models of MEMS devices without concerning the mask layout. Compared with the present geometric design routine, which builds 3D device models through simulating the fabrication process from the photolithography masks, the function-oriented geometric design method allows designers to establish 3D models by using a set of pre-defined volumetric primitives associated with geometric constraints. The fabrication information is derived from the corresponding function-oriented data specified by designers. Hence, designers are released from the down-stream fabrication planning, and can focus on creative design. This research is the application of feature modeling and constraint-based design to the micro world. The workbench of this system is developed on the geometric model kernel ACIS.

Feature Model for Surface Micro-Machined MEMS

2003 ◽  
Author(s):  
Feng Gao ◽  
Y. Steve Hong ◽  
Radha Sarma
Keyword(s):  
Design Methodology ◽  
3D Models ◽  
Geometric Design ◽  
Feature Model ◽  
Design Activity ◽  
Mems Devices ◽  
Design Strategies ◽  
Generalized Framework ◽  
Map Design ◽  
High Level

Lacking proper geometric design capability is one of the main factors that are impeding MEMS development. MEMS developers are suffering the cumbersome and unintuitive traditional design methodology in which the design of a new product begins with figuring out its fabrication mask layouts. As the kernel of new MEMS design methodology, a new model for MEMS devices is highly required to implement structured design strategies. This paper focuses on developing a feature model for MEMS geometric design, which enables designers to create fabrication-ready 3D models of MEMS devices in an intuitive manner. This feature model not only represents the geometric information of the devices but also provides the high level engineering means to describe the design intent, and hence, it can be used to facilitate the decision making process in design and the modification of models in subsequent stages. The separation of design and fabrication allows designers to concentrate on creative design activity without thinking of the tedious fabrication issues. The features specified according to common fabrication process aim to systematically map design intents to fabrication data. A generalized framework for MEMS feature model is presented in which the features are manipulated and managed in a declarative manner.

A Declarative Feature-Based Cross Sectional Design Tool for Surface Micromachined MEMS

2001 ◽  
Author(s):  
Feng Gao ◽  
Radha Sarma
Keyword(s):  
Geometric Model ◽  
Geometric Design ◽  
Design Tool ◽  
Fabrication Process ◽  
Design Tools ◽  
Mems Devices ◽  
Cross Sectional ◽  
New Device ◽  
Feature Based ◽  
Cross Sectional Design

Abstract Currently MEMS designers begin the geometric design of a new device by creating the masks that would lead to a geometric model. At the macro-level, this would be analogous to generating a geometric model from the tool paths, which would be a very tedious task. In contrast to MEMS designers, designers of macro-devices have the advantage of starting with a geometric model and of being able to directly visualize or manipulate their designs. The geometric model is then queried to generate manufacturing-related data. In the case of surface micromachined MEMS, until very recently, there has been no systematic means to automatically generate the mask data after a geometric model of the MEMS device has been refined through behavioral simulations. This has resulted in the lack of geometric design tools that would potentially aid the MEMS designer in creating MEMS devices. This paper focuses on developing a declarative, feature-based design tool for the cross sectional design of surface micromachined MEMS, which enables MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment that is transparent to the fabrication process. The structured nature of MEMS fabrication processes has been exploited to develop a design-by-features approach tailored to MEMS design. In comparison to most macro-design tools where a design-by-features approach does not provide full flexibility, in the case of MEMS, the structured nature of the fabrication process allows for a comprehensive definition of design features that can be systematically mapped to fabrication features. In addition, feature dependency graphs and constraint graphs enable feature reparametrization leading to the easy manipulation of MEMS designs.

scholarly journals Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm

2022 ◽  
Vol 8 (1) ◽  
Author(s):  
Chen Wang ◽  
Yuan Wang ◽  
Weidong Fang ◽  
Xiaoxiao Song ◽  
Aojie Quan ◽  
...  
Keyword(s):  
Genetic Algorithm ◽  
Human Hair ◽  
Design Methodology ◽  
Large Range ◽  
Design Method ◽  
Actuation Voltage ◽  
Superior Performance ◽  
Mems Devices ◽  
Electrostatically Actuated ◽  
Fabrication Tolerances

AbstractThis paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries designed by a genetic algorithm significantly improves the performance of the microgripper. An experiment shows that the designed microgripper has a large displacement (91.5 μm) with a low actuation voltage (47.5 V), which agrees well with the theory. The microgripper has a large actuation displacement and can handle micro-objects with a size from 10 to 100 μm. A grasping experiment on human hair with a diameter of 77 μm was performed to prove the functionality of the gripper. The result confirmed the superior performance of the new design methodology enabling freeform geometries. This design method can also be extended to the design of many other MEMS devices.

Part to Art: Basis for a Systematic Geometric Design Tool for Surface Micromachined MEMS

2000 ◽  
Author(s):  
Venkat A. Venkataraman ◽  
Radha Sarma ◽  
Suresh G. K. Ananthasuresh
Keyword(s):  
Geometric Modeling ◽  
Geometric Model ◽  
Geometric Design ◽  
Design Tool ◽  
Specific Data ◽  
New Device ◽  
Tool Paths ◽  
Mems Device ◽  
Systematic Solution ◽  
Third Dimension

Abstract Currently most MEMS designers begin the geometric design of a new device by creating the masks that would lead to a geometric model. At the macro level, this is analogous to generating a geometric model from the tool paths, which would be a very difficult task. In contrast to MEMS designers, designers of macro devices have the advantage of starting with a geometric model and being able to directly visualize or manipulate their designs. The geometric model is then queried to generate the process specific data. In the case of MEMS, there is no systematic means to generate the mask data after the geometric model of a MEMS device has been refined through behavioral simulations. This paper focuses on automatically generating masks, given a geometric model of the MEMS device and the process sequence (referred to here as the inverse problem). This necessitates the systematic solution of the forward problem, which involves automatically generating a geometric model of the MEMS device given the masks. A systematic and implementation-independent framework for the geometric modeling of MEMS is presented in order to solve the forward and inverse problems for general surface-micro-machined devices. However, all implementations and examples are two-dimensional, i.e., they do not deal with complexity in the third dimension.

EMBODIMENT OF AUTOMATED DESIGNATION OF SURFACE FINISH OF THE OBJECTS OF THE 3D WORKPIECE MODEL

2020 ◽  
pp. 3-9
Author(s):  
M. S. Chepchurov ◽  
B. S. Chetverikov ◽  
A. N. Maslovskaja ◽  
N. S. Ljubimyj
Keyword(s):  
Surface Finish ◽  
Geometric Modeling ◽  
3D Model ◽  
Geometric Model ◽  
3D Models ◽  
Work Piece ◽  
Electronic Model ◽  
Cad Cam ◽  
Engineering Drawings ◽  
Cross Platform

The article discusses the questions of automation of design engineering in the sphere of the formation of 3D geometric model of work-pieces. The authors have designed and carried out an algorithm in the form of the additional script in the software bundle of the geometric modeling, enabling to execute the designation of surface finish in 3D models. The algorithm is based on the freeware CAD/CAM/CAE system – FreeCAD. The structure of an element from an ordered set of data about a geometric object that identifies the surface roughness is determined that allows to expand the capabilities of methods for providing storage and transmission of data of the electronic model of the product. Creation of additional procedures based on the formed list of surface finish according to the GOST 2.309–73 makes it possible to embody 3D-model transfer to the workplaces. It means that time of embodiment of preproduction and production of work-piece can be cut. Nowadays freeware solid geometry engine with open source code is not used due to the absence of additional specific possibilities of making of engineering drawings according to the regulatory requirements. The authors have offered the method of increasing the capabilities of software bundle of the geometric modeling, which provides the increase of target audience of freeware. The authors propose to use free cross-platform language Python to create the script of designation of surface finish in the space of 3D-model. Usage of the example of the script and its testing can help to design other procedures of making of engineering drawings to create fully-featured free cross-platform geometric designing.

Study on Shock Resistance of MEMS Devices with Different Stoppers

2014 ◽  
Vol 609-610 ◽  
pp. 825-830 ◽  
Author(s):  
Tao Jiang ◽  
Yun Wei ◽  
Sai Yao ◽  
Jian Zhou
Keyword(s):  
Design Methodology ◽  
Design Method ◽  
Mems Devices ◽  
Dynamics Model ◽  
Reliability Design ◽  
Traditional Design ◽  
Sharp Stress ◽  
Shock Resistance ◽  
Mems Device ◽  
Shock Environment

The shock resistance of the MEMS device can be improved by simplifying its structure, but it will reduce accuracy. A commonly implemented solution that strengthens the shock resistance is the use of stopper. However, the collision between MEMS structure and stopper in shock environment may lead to the failure of the device. Hence, stopper should have a fine protection performance. In this study, the design method and principle of the MEMS device in the shock environment were analyzed. It was pointed out that the reliability design methodology of the MEMS device based on statics theory was insufficient. Next, the response of MEMS device to shock was studied and the shock dynamics model was established. Based on the model, the shock response of the traditional design and designs with different stoppers were analyzed. At last, experiments were carried out and the protection performance of different stoppers was evaluated. Results show that the use of stopper can obviously improve the shock resistance of the device. Elastic stopper can strengthen the shock resistance of the device greatly because of the excellent protection ability, while hard stopper may cause the emergence of the sharp stress wave.

scholarly journals Complex wall modeling for hemodynamic simulations of intracranial aneurysms based on histologic images

2021 ◽  
Vol 16 (4) ◽  
pp. 597-607
Author(s):  
Annika Niemann ◽  
Samuel Voß ◽  
Riikka Tulamo ◽  
Simon Weigand ◽  
Bernhard Preim ◽  
...  
Keyword(s):  
Wall Thickness ◽  
Vessel Wall ◽  
Intracranial Aneurysms ◽  
Geometric Model ◽  
Image Data ◽  
Outer Wall ◽  
3D Models ◽  
Patient Specific ◽  
Intracranial Vessel ◽  
Hemodynamic Simulations

Abstract Purpose For the evaluation and rupture risk assessment of intracranial aneurysms, clinical, morphological and hemodynamic parameters are analyzed. The reliability of intracranial hemodynamic simulations strongly depends on the underlying models. Due to the missing information about the intracranial vessel wall, the patient-specific wall thickness is often neglected as well as the specific physiological and pathological properties of the vessel wall. Methods In this work, we present a model for structural simulations with patient-specific wall thickness including different tissue types based on postmortem histologic image data. Images of histologic 2D slices from intracranial aneurysms were manually segmented in nine tissue classes. After virtual inflation, they were combined into 3D models. This approach yields multiple 3D models of the inner and outer wall and different tissue parts as a prerequisite for subsequent simulations. Result We presented a pipeline to generate 3D models of aneurysms with respect to the different tissue textures occurring in the wall. First experiments show that including the variance of the tissue in the structural simulation affect the simulation result. Especially at the interfaces between neighboring tissue classes, the larger influence of stiffer components on the stability equilibrium became obvious. Conclusion The presented approach enables the creation of a geometric model with differentiated wall tissue. This information can be used for different applications, like hemodynamic simulations, to increase the modeling accuracy.

scholarly journals Lightweight and maintainable rotary-wing UAV frame from configurable design to detailed design

2021 ◽  
Vol 13 (7) ◽  
pp. 168781402110349
Author(s):  
Huiqiang Guo ◽  
Mingzhe Li ◽  
Pengfei Sun ◽  
Changfeng Zhao ◽  
Wenjie Zuo ◽  
...  
Keyword(s):  
Design Method ◽  
Geometric Model ◽  
Optimization Method ◽  
Frame Structure ◽  
Manufacturing Cost ◽  
Detailed Design ◽  
High Manufacturing Cost ◽  
The Military ◽  
Rotary Wing ◽  
Novel Design

Rotary-wing unmanned aerial vehicles (UAVs) are widespread in both the military and civilian applications. However, there are still some problems for the UAV design such as the long design period, high manufacturing cost, and difficulty in maintenance. Therefore, this paper proposes a novel design method to obtain a lightweight and maintainable UAV frame from configurable design to detailed design. First, configurable design is implemented to determine the initial design domain of the UAV frame. Second, topology optimization method based on inertia relief theory is used to transform the initial geometric model into the UAV frame structure. Third, process design is considered to improve the manufacturability and maintainability of the UAV frame. Finally, dynamic drop test is used to validate the crashworthiness of the UAV frame. Therefore, a lightweight UAV frame structure composed of thin-walled parts can be obtained and the design period can be greatly reduced via the proposed method.

Quasi-static mechanical properties of novel generalized Resch-pattern composite foldcores

2020 ◽  
pp. 095440622094000
Author(s):  
Antao Deng ◽  
Bin Ji ◽  
Xiang Zhou
Keyword(s):  
Mechanical Properties ◽  
Design Method ◽  
Absorption Capacity ◽  
Woven Fabrics ◽  
Geometric Design ◽  
Honeycomb Core ◽  
Reinforced Plastic ◽  
Static Mechanical ◽  
Laminate Thickness ◽  
Static Mechanical Properties

A new geometric design method for foldcores based on the generalized Resch patterns that allow face-to-face bonding interfaces between the core and the skins is proposed. Based on the geometric design method, a systematic numerical investigation on the quasi-static mechanical properties of the generalized Resch-based foldcores made of carbon fiber-reinforced plastic (CFRP) woven fabrics subjected to compression and shear loads is performed using the finite element method that is validated by experiments. The relationships between the mechanical properties and various geometric parameters as well as laminate thickness of the generalized Resch-based CFRP foldcores are revealed. Additionally, the mechanical properties of the generalized Resch-based CFRP foldcore are compared to those of the standard Resch-based, Miura-based foldcore, the honeycomb core, and the aluminum counterpart. It is found that the generalized Resch-based CFRP foldcore performs more stably than the honeycomb core under compression and has higher compressive and shear stiffnesses than the standard Resch-based and Miura-based foldcores and absorbs as nearly twice energy under compression as the Miura-based foldcore does. When compared with the aluminum counterpart, the CFRP model has higher weight-specific stiffness and strength but lower energy absorption capacity under shearing. The results presented in this paper can serve as the useful guideline for the design of the generalized Resch-based composite foldcore sandwich structures for various performance goals.

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