The Error Analysis of Micro-Flow Self-Sensing Actuator
In this article the micro flow self-sensing actuator has carried on the theoretical analysis and experimental research. Using output micro-displacement generated by the first inverse piezoelectric effect to realize cell micro flow injection, using output voltage generated by secondary direct piezoelectric effect of piezoelectric ceramic to self-sensing the output displacement in the process of the micro flow injection. The experimental results show that the micro-displacement of micro-flow self-sensing actuator has nonlinear error, error is 5.03%. The error between measured micro-displacement and self-sensing micro-displacement is 63.13%. In this paper, the error causes analysis of micro-flow self-sensing actuator is from non-linearity and hysteresis, external factors, it lay the foundation for the further study of micro-flow self-sensing actuator.