Applied Research on Self-Sensing Micro-Flow Injection Device Based on Piezoelectric Ceramics
Experimental research of first inverse, secondary positive piezoelectric effects are performed through the PZT-5 piezoelectric ceramics. Introduce a concept of self-sensing micro-flow injection device based on piezoelectric ceramics. Utilized the characteristic of the first inverse piezoelectric effect which can generate micro-displacement, micro-position and then micro-injection can be realized by the micro-change of piezoelectric ceramic’s volume. Self-sensing displacement in micro-injection process can be obtained by utilizing the secondary direct piezoelectric effect. The experimental data: if the external voltages which were applied to the stack are 20V and 40V, the theoretical displacement generated by the first inverse piezoelectric effect are 4μm and 8μm respectively, the actual measured values are 3.57μm and 8.12μm respectively, self-sensing displacement of secondary direct piezoelectric effect are 1.48μm and 2.53μm respectively. It proves that the theoretical and experimental device could sense the displacement of micro-injection and the integration of sensor and actuator can be achieved.