SiC Super Junction Power Devices: Modeling and Analysis
2005 ◽
Vol 483-485
◽
pp. 957-960
Keyword(s):
In this paper, we extend the super junction concept to SiC high voltage devices and further expand the SiC theoretical limit. It is shown that the super-junction concept can reduce the theoretical specific on-resistance by several times to several orders of magnitude for both silicon and SiC. The unique merit of SiC super-junction devices is that the required P and N pillars have a much smaller aspect ratio and may be easier to form than their silicon counterparts. Furthermore, SiC super-junction devices are much less sensitive to charge imbalance issue than silicon SJ devices.
1980 ◽
Vol 38
◽
pp. 822-825
Keyword(s):
2015 ◽
Keyword(s):
2021 ◽
Vol 2125
(1)
◽
pp. 012051