An X-Ray Diffraction Method to Determine Stress at Constant Penetration/Information Depth
2006 ◽
Vol 524-525
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pp. 13-18
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Keyword(s):
X Ray
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A rigorous strategy for (X-ray) diffraction stress measurements at fixed penetration/information depths is described. Thereby errors caused by lack of penetration-depth control in traditional (X-ray) diffraction (sin2ψ) measurements are annulled. The ranges of accessible penetration/information depths and experimental aspects are briefly discussed. The power of the method is illustrated by the analysis of an only small stress gradient in a sputter-deposited nickel layer.