Degradation of Charge Collection Efficiency for 6H-SiC Diodes by Electron Irradiation
2008 ◽
Vol 600-603
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pp. 1043-1046
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Keyword(s):
Ion Beam
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6H-SiC n+p diodes fabricated on a p-type epitaxial layer were irradiated with 1MeV-electrons at fluences up to 6×1016 cm-2 to clarify their radiation tolerance. Charge Collection Efficiencies (CCEs) were evaluated from the Transient Ion Beam Induced Current (TIBIC) using Oxygen (O) ions. The CCE of 93 % was obtained for non-electron-irradiated diodes, and no significant change in CCE was observed for diodes irradiated with electrons at fluences below 1×1015 cm-2. The degradation of CCE was observed after irradiation at fluences above 5×1015 cm-2.
Degradation of Charge Collection Efficiency Obtained for 6H-SiC n+p Diodes Irradiated with Gold Ions
2007 ◽
Vol 556-557
◽
pp. 913-916
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Keyword(s):
Ion Beam
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2010 ◽
Vol 645-648
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pp. 921-924
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2017 ◽
Vol 127
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pp. 130-136
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Keyword(s):
2007 ◽
Vol 581
(1-2)
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pp. 322-325
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2004 ◽
Vol 518
(1-2)
◽
pp. 340-342
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Keyword(s):
1993 ◽
Vol 32
◽
pp. 415-424
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