Influence of Annealing Parameters on Surface Roughness, Mobility and Contact Resistance of Aluminium Implanted 4H SiC
2011 ◽
Vol 679-680
◽
pp. 417-420
Keyword(s):
The impact of implantation temperature and dose as well as the annealing process with and without a graphite capping layer on surface roughness, carrier mobility and specific contact resistance are investigated and compared. The use of the capping layer is proven to be particularly advantageous: (1) a deterioration of surface roughness can be avoided even for high dose implantations and (2) the specific contact resistance is reduced. Furthermore, it is shown that a capping layer prevents surface contamination during annealing.
2008 ◽
Vol 600-603
◽
pp. 639-642
2011 ◽
Vol 679-680
◽
pp. 413-416
2015 ◽
Vol 821-823
◽
pp. 395-398
2007 ◽
Vol 556-557
◽
pp. 1027-1030
◽
Keyword(s):