Preparation, Characterization and Nox Sensing Characteristics of Sensor Grade CuInO2 Thin Films
Keyword(s):
P Type
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CuInO2phase, a p-type semi-conducting oxide was successfully stabilized in thin film form by pulsed laser deposition technique and the deposition parameters were optimized. The gas sensing studies carried out on thin film of CuInO2for different concentrations of NOxexhibited a decrease in resistance, a characteristic of p-type semiconductor. The thin film responded to 4 vppm of NOxin air. The CuInO2thin film did not respond to trace levels of hydrogen, ammonia and petroleum gas at this operating temperature and thus offering selectivity to NOx.