Pattern Transfer of 23-Nm-Diameter Block Copolymer Self-Assembled Nanodots Using CF4 Etching with Carbon Hard Mask (CHM) as Mask

2013 ◽  
Vol 737 ◽  
pp. 133-136 ◽  
Author(s):  
Miftakhul Huda ◽  
Jing Liu ◽  
Zulfakri bin Mohamad ◽  
You Yin ◽  
Sumio Hosaka
Keyword(s):  
Block Copolymer ◽  
Self Assembly ◽  
Pattern Transfer ◽  
Promising Alternative ◽  
Hard Mask ◽  
Dimethyl Siloxane ◽  
Assembly Technique ◽  
Self Assembled ◽  
Ultrahigh Density ◽  
Potential Use

The self-assembly of block copolymer (BCP) has demonstrated as promising alternative technology to overcome the limitation of conventional lithography owing to its ability in forming nanostructure with size 3-100 nm. In this study, we investigated a technique to transfer self-assembled nanodots of Poly(styrene-b-dimethyl siloxane) (PS-PDMS) BCP to Si. The pattern transfer of PS-PDMS nanodots with the pitch of 33 nm and the diameter of 23 nm using CF4 etching with Carbon Hard Mask (CHM) as Mask is demonstrated. Si nanopillar with height of 51 nm was fabricated. This result improves the potential use of PS-PDMS BCP self-assembly technique for fabrication nano-electronic devices, such as quantum dot solar cell and ultrahigh density of magnetic recording.

Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled Nanodots

2013 ◽  
Vol 596 ◽  
pp. 88-91
Author(s):  
Jing Liu ◽  
Miftakhul Huda ◽  
Zulfakri bin Mohamad ◽  
Hui Zhang ◽  
You Yin ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Molecular Mass ◽  
Pattern Transfer ◽  
Si Substrate ◽  
Carbon Tetrafluoride ◽  
Dimethyl Siloxane ◽  
Nanodot Arrays ◽  
Self Assembled ◽  
Ultrahigh Density ◽  
20 Nm

We investigated the fabrication of self-assembled nanodot array using poly (styrene)-poly (dimethyl-siloxane) (PS-PDMS) block copolymer and its transfer technique as a promising method to fabricate magnetic nanodot arrays for ultrahigh density recording. A carbon (C) layer with a high etch-resistance was especially adopted for magnetic nanodot fabrication. We fabricated PDMS nanodot using PS-PDMS block copolymer with a molecular mass of 11,700-2,900 g/mol. The nanodots were first transferred into silicon (Si) layer and then into C layer on Si substrate by carbon tetrafluoride (CF4) and oxygen (O2) reactive ion etching (RIE), respectively. We succeeded in fabricating C nanodots with a diameter of 10 nm and an average pitch of 20 nm.

Improved Observation Contrast of Block-Copolymer Nanodot Pattern Using Carbon Hard Mask (CHM)

2013 ◽  
Vol 534 ◽  
pp. 126-130 ◽  
Author(s):  
Takashi Akahane ◽  
Takuya Komori ◽  
Jing Liu ◽  
Miftakhul Huda ◽  
Zulfakri bin Mohamad ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Carbon Film ◽  
Pattern Transfer ◽  
Si Substrate ◽  
Hard Mask ◽  
Dimethyl Siloxane ◽  
Transfer Pattern

In this work, improvement of the observation contrast was investigated by using a carbon film as the hard mask for pattern transfer of block copolymer (BCP) nanodots. The PS-PDMS (Poly (styrene-b-dimethyl siloxane)) block copolymer was adopted here. The observation contrast was greatly improved after transferring block copolymer (BCP) nanodots pattern to the underlying Si substrate through the carbon hard mask compared that before nanodot pattern transfer. Pattern transfer was also demonstrated to be very effective using carbon hard mask.

Block copolymer self-assembly assisted fabrication of laterally organized- and stacked- nanoarrays

2021 ◽  
Author(s):  
Vignesh Suresh ◽  
Ah Bian Chew ◽  
Christina Yuan Ling Tan ◽  
Hui Ru Tan
Keyword(s):  
Block Copolymer ◽  
Self Assembly ◽  
The Self ◽  
Functional Surfaces ◽  
Self Assembled ◽  
Block Copolymer Lithography ◽  
Unique Surface ◽  
Copolymer Lithography

Abstract Block copolymer (BCP) self-assembly processes are often seen as reliable techniques for advanced nanopatterning to achieve functional surfaces and create templates for nanofabrication. By taking advantage of the tunability in pitch, diameter and feature-to-feature separation of the self-assembled BCP features, complex, laterally organized- and stacked- multicomponent nanoarrays comprising of gold and polymer have been fabricated. The approaches not only demonstrate nanopatterning of up to two levels of hierarchy but also investigate how a variation in the feature-to-feature gap at the first hierarchy affects the self-assembly of polymer features at the second. Such BCP self-assembly enabled multicomponent nanoarray configurations are rarely achieved by other nanofabrication approaches and are particularly promising for pushing the boundaries of block copolymer lithography and in creating unique surface architectures and complex morphologies at the nanoscale.

Self-assembly of gold nanoparticles in a block copolymer aggregate template driven by hydrophobic interactions

2019 ◽  
Vol 10 (46) ◽  
pp. 6269-6277
Author(s):  
Jong Dae Jang ◽  
Sang-Woo Jeon ◽  
Young-Jin Yoon ◽  
Joona Bang ◽  
Young Soo Han ◽  
...  
Keyword(s):  
Gold Nanoparticles ◽  
Block Copolymer ◽  
Self Assembly ◽  
Hydrophobic Interactions ◽  
Self Assembled

We report various self-assembled structures of gold nanoparticles in a block copolymer aggregate template, which are easily driven by hydrophobic interactions.

scholarly journals Electrochemistry Study of Permselectivity and Interfacial Electron Transfers of a Branch-Tailed Fluorosurfactant Self-Assembled Monolayer on Gold

Molecules ◽  
2018 ◽  
Vol 23 (11) ◽  
pp. 2998 ◽  
Author(s):  
Shanshan Li ◽  
Qingying Luo ◽  
Zhiqing Zhang ◽  
Guanghui Shen ◽  
Hejun Wu ◽  
...  
Keyword(s):  
Self Assembly ◽  
Electrochemical Impedance ◽  
Click Reaction ◽  
Hydration Shell ◽  
Self Assembled Monolayer ◽  
Tunneling Mechanism ◽  
Assembly Technique ◽  
Hydration Resistance ◽  
Self Assembled ◽  
Electron Transfers

We investigated the permselectivity and interfacial electron transfers of an amphiphilic branch-tailed fluorosurfactant self-assembled monolayer (FS-SAM) on a gold electrode by cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). The FS-SAM was prepared by a self-assembly technique and a “click” reaction. The barrier property and interfacial electron transfers of the FS-SAM were also evaluated using various probes with different features. The FS-SAM allowed a higher degree of permeation by small hydrophilic (Cl− and F−) electrolyte ions than large hydrophobic (ClO4− and PF6−) ones. Meanwhile, the redox reaction of the Fe(CN)63− couple was nearly completely blocked by the FS-SAM, whereas the electron transfer of Ru(NH3)63+ was easier than that of Fe(CN)63−, which may be due to the underlying tunneling mechanism. For hydrophobic dopamine, the hydrophobic bonding between the FS-SAM exterior fluoroalkyl moieties and the hydrophobic probes, as well as the hydration resistance from the interior hydration shell around the oligo (ethylene glycol) moieties, hindered the transport of hydrophobic probes into the FS-SAM. These results may have profound implications for understanding the permselectivity and electron transfers of amphiphilic surfaces consisting of molecules containing aromatic groups and branch-tailed fluorosurfactants in their structures.

A star-shaped amphiphilic block copolymer with dual responses: synthesis, crystallization, self-assembly, redox and LCST–UCST thermoresponsive transition

2016 ◽  
Vol 7 (30) ◽  
pp. 4901-4911 ◽  
Author(s):  
Hua Yuan ◽  
Hai Chi ◽  
Weizhong Yuan
Keyword(s):  
Block Copolymer ◽  
Self Assembly ◽  
Amphiphilic Block Copolymer ◽  
Redox Responsive ◽  
Self Assembled

The micelles/aggregates that were self-assembled from a star-shaped copolymer presented redox-responsive behaviour and LCST–UCST thermoresponsive transition.

Self-assembly of rod-terminally tethered three-armed star-shaped coil block copolymer: Investigation of the presence of the branching in the coil to the self-assembled behavior

Polymer ◽  
2008 ◽  
Vol 49 (25) ◽  
pp. 5596-5601 ◽  
Author(s):  
Yingdong Xia ◽  
Zhaoyan Sun ◽  
Tongfei Shi ◽  
Jizhong Chen ◽  
Lijia An ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Self Assembly ◽  
The Self ◽  
Self Assembled

Layer-by-layer self-assembled laminin/fucoidan films: towards better hemocompatibility and endothelialization

RSC Advances ◽  
2016 ◽  
Vol 6 (61) ◽  
pp. 56048-56055 ◽  
Author(s):  
Yan Wang ◽  
Changrong Ye ◽  
Hong Su ◽  
Juan Wang ◽  
Yanan Wang ◽  
...  
Keyword(s):  
Self Assembly ◽  
Multilayer Film ◽  
Layer By Layer ◽  
Assembly Technique ◽  
Self Assembled

The laminin/fucoidan multilayer film is prepared on glass via layer-by-layer self-assembly technique and monitored the assembled process by QCM-D. This film can inhibit platelets adhesion and improve ECs and EPCs adhesion.

Formation of Antibody Microarrays on Aluminum Nitride Surface Using Patterned Organosilane Self-Assembled Monolayers

2009 ◽  
Vol 1202 ◽  
Author(s):  
Chi-Shun Chiu ◽  
Hong-Mao Lee ◽  
Shangjr Gwo
Keyword(s):  
Aluminum Nitride ◽  
Aluminum Gallium Nitride ◽  
Self Assembly ◽  
Fluorescent Protein ◽  
Specific Protein ◽  
Self Assembled Monolayer ◽  
Antibody Microarrays ◽  
Assembly Technique ◽  
Self Assembled ◽  
Lift Off

AbstractSurface biofunctionalization of group-III nitride semiconductors has recently attracted much interest due to their biocompatibility, nontoxicity, and long-term chemical stability under demanding physiochemical conditions for chemical and biological sensing. Among III-nitrides, aluminum nitride (AlN) and aluminum gallium nitride (AlGaN) are particularly important because they are often used as the sensing surfaces for sensors based on field-effect transistor or surface acoustic wave sensor structures. Patterned self-assembled monolayer (SAM) templates are composed of two types of organosilane molecules terminated with different functional groups (amino and methyl), which were fabricated on AlN/sapphire substrates by combining photolithography, lift-off process, and self-assembly technique. Clear imaging contrast of SAM micropatterns can be observed by field emission scanning electron microscopy (FE-SEM) operating at a low accelerating voltage in the range of 0.5–1.5 kV. In this work, the formation of green fluorescent protein (GFP) antibody microarrays was demonstrated by the specific protein binding of enhanced GFP (EGFP) labeling. The observed strong fluorescent signal from antibody functionalized regions on the SAM-patterned AlN surface indicates the retained biological activity of specific molecular recognition resulting from the antibody–EGFP interaction. The results reported here show that micropatterning of organosilane SAMs by the combination of photolithographic process and lift-off technique is a practical approach for the fabrication of reaction regions on AlN-based bioanalytical microdevices.

Self-aligned self-assembled organosilicate line patterns of ~20nm half-pitch from block-copolymer mediated self assembly

2007 ◽  
Author(s):  
Ho-Cheol Kim ◽  
Joy Cheng ◽  
Charles Rettner ◽  
Oun-Ho Park ◽  
Robert Miller ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Self Assembly ◽  
Self Assembled ◽  
Line Patterns
Sign in / Sign up

Export Citation Format

Share Document