Top-Seeded Solution Growth of 3 Inch Diameter 4H-SiC Bulk Crystal Using Metal Solvents
2014 ◽
Vol 778-780
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pp. 79-82
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Keyword(s):
We performed top-seeded solution growth of 4H-SiC for obtaining longer length crystal. Si-Cr and Si-Ti melts were used as solvents. Meniscus formation technique was applied to the present study. Special attention was paid to improve the process stability during long-term growth. One of major technological problems in the solution growth is that the precipitation of polycrystalline SiC which hiders the stable single crystal growth. Another problem is the fluctuation of supersaturation at the growth interface during the growth. Through the optimization of growth process conditions, we have successfully grown 4H-SiC single crystals up to 14 mm long with three-inch-diameter, and evaluated their crystalline quality.
2020 ◽
Vol 532
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pp. 125437
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2012 ◽
Vol 717-720
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pp. 61-64
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Keyword(s):
Keyword(s):
2010 ◽
Vol 53
(5-6)
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pp. 940-943
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Keyword(s):
Keyword(s):
1996 ◽
Vol 11
(2)
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pp. 288-295
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1999 ◽
Vol 34
(2)
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pp. 261-265
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