Magnetic Field Analysis for Magnetron Sputtering Apparatus for Accurate Composition Control

2009 ◽  
Vol 154 ◽  
pp. 175-179 ◽  
Author(s):  
Yutaka Sakurai ◽  
Ryo Nakajima ◽  
Hiroko Nakamura
Keyword(s):  
Magnetic Field ◽  
Finite Element Method ◽  
Magnetron Sputtering ◽  
Field Analysis ◽  
The Finite Element Method ◽  
Film Composition ◽  
Composite Target ◽  
Composition Control ◽  
Magnetic Field Analysis ◽  
The Magnetic Field

Authors use magnetron sputtering technique for controlling the film composition by modifying the magnetic field with an external solenoid in addition to the magnetic field with a permanent magnet on back of composite target. It is necessary to understand the contribution of the solenoid quantitatively for the effective application of this technique. The magnetic field changes by the solenoid current on the target were calculated by the finite element method (FEM), and compared with the film composition. As the solenoid current increases, magnetic tunnel region on the target (correspond with the well sputtered region by the confined plasma) moves to the centre of the target. The behaviour corresponds with the actually formed film composition. The calculated results also give an information to design the composite target and the correction value for using the already eroded target.

Electromagnetic Field Analysis and Measurement for High Speed Attraction Type Magnetic Levitation Vehicle Systems

2005 ◽  
Vol 295-296 ◽  
pp. 655-660
Author(s):  
D.X. Chen ◽  
M.C. Pan ◽  
F.L. Luo ◽  
Z.W. Kang ◽  
W.G. Tian ◽  
...  
Keyword(s):  
Magnetic Field ◽  
High Speed ◽  
Magnetic Levitation ◽  
Experimental System ◽  
Air Gap ◽  
Field Analysis ◽  
The Finite Element Method ◽  
Magnetic Field Analysis ◽  
Vehicle Systems ◽  
The Magnetic Field

Research achievements in a high speed attraction type magnetic levitation vehicle experimental system are reported. The high speed attraction type magnetic levitation vehicle constitutes a typical long stator linear synchronous motor. The study on levitation and propulsive electromagnetic fields is of great importance and is studied. Owing to the influence of the stator grooves and the material discontinuousness, the magnetic field distribution is very complex to be analyzed in analytical forms. The magnetic fields in the air gap are determined using the finite element method. The levitation force and thrust produced by the levitation magnetic field and the propulsive magnetic field are calculated. They are found to vary following the change of the air gap and exciting current. A magnetic field strength measurement system based on a hall sensor is designed. Experimental results are compared with the results from the magnetic field analysis.

Magnetic Field Analysis of Surface-Mounted Permanent Magnet Motors Using Schwarz-Christoffel Mapping

2012 ◽  
Vol 466-467 ◽  
pp. 940-945
Author(s):  
Xiao Hui Lu ◽  
Jian Hong Liang
Keyword(s):  
Magnetic Field ◽  
Permanent Magnet ◽  
Field Analysis ◽  
The Finite Element Method ◽  
Permanent Magnet Motors ◽  
Basic Tool ◽  
Magnetic Field Analysis ◽  
Optimizing Design ◽  
And Performance ◽  
The Magnetic Field

The paper presents the magnetic field distribution from the armature winding currents in the slotted air gap of surface-mounted permanent magnet (SMPM) motors using the Schwarz- Christoffel(SC) mapping. With the method, a slotted structure of SMPM motors is transformed into a geometrically simpler domain. Compared with the result from the finite element method, the accuracy of the method is verified. The presented work can be a basic tool for optimizing design and performance analysis of permanent magnet motors.

scholarly journals Static force characteristics of electromagnetic actuators for Braille screen

2011 ◽  
Vol 24 (2) ◽  
pp. 157-167 ◽  
Author(s):  
Ivan Yatchev ◽  
Krastio Hinov ◽  
Iosko Balabozov ◽  
Kristina Krasteva
Keyword(s):  
Magnetic Field ◽  
Finite Element Method ◽  
Finite Element ◽  
Permanent Magnet ◽  
Static Force ◽  
The Finite Element Method ◽  
Electromagnetic Actuators ◽  
Minimum Force ◽  
The Magnetic Field ◽  
Force Characteristics

Several constructions of electromagnetic actuators with moving permanent magnet for Braille screen are studied. All they are formed from a basic one that consists of two coils, core and moving permanent magnet. The finite element method is used for modeling of the magnetic field and for obtaining the electromagnetic force acting on the mover. The static force-stroke characteristics are obtained for four different constructions of the actuator. The constructions with ferromagnetic disc between the coils ensure greater force than the ones without disc and can reach the required minimum force.

Time-Domain Parallel Finite-Element Method for Fast Magnetic Field Analysis of Induction Motors

2013 ◽  
Vol 49 (5) ◽  
pp. 2413-2416 ◽  
Author(s):  
Yasuhito Takahashi ◽  
Tadashi Tokumasu ◽  
Masafumi Fujita ◽  
Takeshi Iwashita ◽  
Hiroshi Nakashima ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Finite Element Method ◽  
Finite Element ◽  
Time Domain ◽  
Induction Motors ◽  
Field Analysis ◽  
Magnetic Field Analysis ◽  
Parallel Finite Element ◽  
Element Method

2-D Magnetic Field Analysis of Air Cylinder with MR Sensor

2011 ◽  
Vol 121-126 ◽  
pp. 2706-2709
Author(s):  
Dan Jiang ◽  
Ping Yang ◽  
Kun Jiang
Keyword(s):  
Magnetic Field ◽  
Field Analysis ◽  
Magnetic Flux Density ◽  
Piston Motion ◽  
Element Analysis ◽  
Pneumatic Control ◽  
Magnetoresistive Sensor ◽  
Magnetic Field Analysis ◽  
Working Principle ◽  
The Magnetic Field

As a type of solid state switch, MR (magnetoresistive) sensor detects the air cylinder piston’s position in pneumatic control system. The construction and working principle of the air cylinder with MR sensor are introduced. Using 2-D magnetic field finite element analysis (FEA) method, the magnetic field distribution of air cylinder with piston motion is analyzed. Simulation results are given. The magnetic flux density characteristics are compared between piston wear or not.

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