A Comparative Study for the Backside Illumination (BSI) Technology Using Bonding Wafer Cleaning Process for Advanced CMOS Image Sensor

2012 ◽  
Vol 195 ◽  
pp. 75-78
Author(s):  
Chung Kyung Jung ◽  
Sung Wook Joo ◽  
Seoung Hun Jeong ◽  
Sang Wook Ryu ◽  
Han Choon Lee ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Comparative Study ◽  
Quantum Efficiency ◽  
Wafer Bonding ◽  
Image Sensor ◽  
Silicon On Insulator ◽  
Cleaning Process ◽  
Electrochemical Systems ◽  
Wafer Cleaning ◽  
Direct Wafer Bonding

Over the last decades, the concept of backside illumination (BSI) sensors has become one of the leading solutions to optical challenges such as improved quantum efficiency (QE), and cross-talk, respectively [1-. Direct wafer bonding is a method for fabricating advanced substrates for micro-electrochemical systems (MEMS) and integrated circuits (IC). The most typical example of such an advanced substrate is the silicon-on-insulator (SOI) wafer.

150 mm InP-to-Silicon Direct Wafer Bonding for Silicon Photonic Integrated Circuits

2019 ◽  
Vol 16 (8) ◽  
pp. 235-241 ◽  
Author(s):  
Di Liang ◽  
Alexander Fang ◽  
Douglas Oakley ◽  
Antonio Napoleone ◽  
David Chapman ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Wafer Bonding ◽  
Photonic Integrated Circuits ◽  
Silicon Photonic ◽  
Direct Wafer Bonding

Structural Evaluation of Silicon‐on‐Insulator Fabricated by a Direct Wafer Bonding and Numerically Controlled Polishing Technique

1991 ◽  
Vol 138 (8) ◽  
pp. 2468-2474 ◽  
Author(s):  
A. Yamada ◽  
Bai‐Lin Jiang ◽  
G. A. Rozgonyi ◽  
H. Shirotori ◽  
O. Okabayashi ◽  
...  
Keyword(s):  
Wafer Bonding ◽  
Silicon On Insulator ◽  
Structural Evaluation ◽  
Direct Wafer Bonding

Fabrication of Strained Silicon on Insulator (SSOI) by Direct Wafer Bonding Using Thin Relaxed SiGe Film as Virtual Substrate

2004 ◽  
Vol 809 ◽  
Author(s):  
J.J. Lee ◽  
J.S. Maa ◽  
D. J. Tweet ◽  
S.T. Hsu
Keyword(s):  
Wafer Bonding ◽  
Lattice Relaxation ◽  
Channel Length ◽  
Silicon On Insulator ◽  
Si Substrate ◽  
Strained Si ◽  
Drive Current ◽  
Defect Zone ◽  
Direct Wafer Bonding ◽  
Strained Sige

ABSTRACTNMOS devices have been successfully fabricated on SSOI wafers. The SSOI wafer fabrication is by direct wafer bonding and wafer transfer by splitting of the strained Si on thin SiGe virtual substrate to an oxidized wafer. The thin SiGe virtual substrate is fabricated by strained SiGe deposition, H2+ implantation, and SiGe lattice relaxation anneal. This relaxation process creates a confined defect zone at the SiGe to Si substrate interface that ensures low defect strained Si growth. 10 μm by 10 μm NMOS SSOI devices show an improvement of 100% in drive current and 115% in transconductance. A near ideal subthreshold swing was observed on NMOS devices with channel length as short as 0.1 μm.

Silicon on insulator optical waveguides formed by direct wafer bonding

1992 ◽  
Vol 15 (2) ◽  
pp. 156-159 ◽  
Author(s):  
G.T. Reed ◽  
Li Jinhua ◽  
C.K. Tang ◽  
Lin Chenglu ◽  
P.L.F. Hemment ◽  
...  
Keyword(s):  
Wafer Bonding ◽  
Optical Waveguides ◽  
Silicon On Insulator ◽  
Direct Wafer Bonding

TEM Study of bonded silicon wafers

1995 ◽  
Vol 53 ◽  
pp. 460-461
Author(s):  
L. Mulestagno ◽  
R. Craven ◽  
P. Fraundorf
Keyword(s):  
Wafer Bonding ◽  
Silicon Film ◽  
Poor Quality ◽  
Silicon On Insulator ◽  
Back Side ◽  
Interface Quality ◽  
Direct Wafer Bonding ◽  
Analytical Work ◽  
Radiation Hard ◽  
Plane View

The promise of higher speed, radiation hard, high temperature capabilities, and increased device density has made SOI ( silicon - on - insulator) an attractive proposition since its conception several years ago . Until recently the methods for its manufacture had been plagued by low yields, and poor quality . Remarkable advances have been made lately resulting in increasing quantities of SOI wafers being sold commercially.The two main techniques for making SOI are Separation by Implantation of Oxygen (SIMOX) and direct wafer bonding (Bonded wafers). Little analytical work has yet been performed on the latter by the microscopy community at large, so we studied 2 commercial quality wafers with the intent of looking for particulate defects which might arise during annealing, and studying the oxide layer and oxide-SOI interface quality.Plane view samples were made from the SOI taking advantage of its chemistry, by dimpling and milling from the back-side, and then dipping in HF which attacks the oxide, and leaves large areas of silicon film suitable for TEM untouched.

Synthesis of Soi Materials Using Plasma Immersion Ion Implantation

1996 ◽  
Vol 438 ◽  
Author(s):  
Paul K. Chu
Keyword(s):  
Integrated Circuits ◽  
Ion Implantation ◽  
Wafer Bonding ◽  
Processing Time ◽  
Silicon On Insulator ◽  
Current Status ◽  
Silicon Substrates ◽  
Wafer Size ◽  
Plasma Immersion Ion Implantation ◽  
Work Done

AbstractAs the dimensions of integrated circuits shrink towards the deep sub-micromeLer regime, silicon-on-insulator is regarded to be more favorable than silicon substrates. The biggest drawback of SOI is cost which will become more critical for next generation 300-nm silicon wafers. Plasma immersion ion implantation (PIII) provides a viable alternative for the fabrication of SOI wafers as the processing time is very short and independent of wafer size. Pill is being employed to synthesize two types of SOI materials, SPIMOX (Separation by Plasma IMplantation of OXygen) and bonded SOL. In SPIMOX fabrication, both oxygen and water plasmas have been attempted and the results indicate that a discrete buried oxide layer can indeed be formed. In the case of wafer bonding, PIII is utilized for smart-cutting, a process in which implanted hydrogen or helium causes the bonded wafer to crack along the plane thereby making one side of the wafer recyclable. This article reviews the work done and current status of SOI fabrication by PIII.

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