Mechanical Properties of in-situ Doped Polycrystalline 3C-SiC Thin Films by APCVD
2009 ◽
Vol 22
(3)
◽
pp. 235-238
2015 ◽
Vol 7
(32)
◽
pp. 17874-17883
◽
2010 ◽
Vol 405
(2)
◽
pp. 513-516
◽
Keyword(s):
Keyword(s):