Characterization of TiN films sputter-deposited at low temperatures for Cu-through-silicon via

2019 ◽  
Vol 58 (SB) ◽  
pp. SBBC03 ◽  
Author(s):  
Masaru Sato ◽  
Hideki Kitada ◽  
Mayumi B. Takeyama
2012 ◽  
Vol 62 ◽  
pp. 47-50 ◽  
Author(s):  
Sevan Karabetoglu ◽  
Altug Sisman ◽  
Z. Fatih Ozturk ◽  
Turker Sahin

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts

2017 ◽  
Vol 8 ◽  
Author(s):  
Lu Meng ◽  
Yangdong Zhang ◽  
Huimin Liu ◽  
Shengguo Zhao ◽  
Jiaqi Wang ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document