Effect of local gas heating on a plasma structure driven at radio frequency in a microcell in Ar at atmospheric pressure

2014 ◽  
Vol 53 (3) ◽  
pp. 036001 ◽  
Author(s):  
Masaki Yamasaki ◽  
Takashi Yagisawa ◽  
Toshiaki Makabe
2011 ◽  
Vol 18 (4) ◽  
pp. 043503 ◽  
Author(s):  
Dan Bee Kim ◽  
H. Jung ◽  
B. Gweon ◽  
S. Y. Moon ◽  
J. K. Rhee ◽  
...  

2008 ◽  
Vol 80 (9) ◽  
pp. 1919-1930 ◽  
Author(s):  
Gheorghe Dinescu ◽  
Eusebiu R. Ionita

We report on the operation and characteristics of radio frequency (RF) plasma beam sources based on the expansion of the discharge outside of limited spaces with small interelectrode gaps. The appropriate electrode configuration, combined with high mass flow values and appropriate power levels, leads to small- or large-size plasma jets, working stably at low, intermediate, and atmospheric pressures. The sources are promising tools for a wide range of applications in thin film deposition, surface modification, and cleaning, including the case of temperature-sensitive substrates.


2011 ◽  
Vol 39 (4) ◽  
pp. 1092-1098 ◽  
Author(s):  
Min-Hao Yuan ◽  
Yu-Ying Lin ◽  
Ching-Yuan Chang ◽  
Cha-Chi Chang ◽  
Je-Lueng Shie ◽  
...  

2014 ◽  
Vol 23 (4) ◽  
pp. 042001 ◽  
Author(s):  
Z Navrátil ◽  
L Dosoudilová ◽  
R Josepson ◽  
P Dvořák ◽  
D Trunec

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