Influences of growth parameters on the film formation of hexagonal boron nitride thin films grown on sapphire substrates by low-pressure chemical vapor deposition

2016 ◽  
Vol 55 (5S) ◽  
pp. 05FD09 ◽  
Author(s):  
Naoki Umehara ◽  
Atsushi Masuda ◽  
Takaki Shimizu ◽  
Iori Kuwahara ◽  
Tetsuya Kouno ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Growth Parameters ◽  
Hexagonal Boron Nitride ◽  
Film Formation ◽  
Chemical Vapor ◽  
Sapphire Substrates ◽  
Pressure Chemical
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