A New Field Plate Structure for Suppression of Leakage Current of AlGaN/GaN HEMTs

2006 ◽  
Author(s):  
Young-Hwan Choi ◽  
Min-Woo Ha ◽  
Jiyong Lim ◽  
Min-Koo Han
2007 ◽  
Vol 4 (7) ◽  
pp. 2736-2739 ◽  
Author(s):  
Akira Nakajima ◽  
Mitsuaki Shimizu ◽  
Hajime Okumura

2019 ◽  
Vol 13 ◽  
pp. 102250 ◽  
Author(s):  
Dan Zhao ◽  
Zhangcheng Liu ◽  
Juan Wang ◽  
Wenyang Yi ◽  
Ruozheng Wang ◽  
...  

2010 ◽  
Vol 31 (7) ◽  
pp. 659-661 ◽  
Author(s):  
Wataru Saito ◽  
Yorito Kakiuchi ◽  
Tomohiro Nitta ◽  
Yasunobu Saito ◽  
Takao Noda ◽  
...  

2009 ◽  
Vol 615-617 ◽  
pp. 971-974 ◽  
Author(s):  
Young Hwan Choi ◽  
Ji Yong Lim ◽  
Kyu Heon Cho ◽  
Young Shil Kim ◽  
Min Koo Han

AlGaN/GaN HEMTs employing a tapered field plate, which decreases the gate leakage current and improves the breakdown voltage without any sacrifice of the forward electrical characteristics were proposed and fabricated. The tapered structure was fabricated by the wet etching process. The depletion region of the proposed structure expands toward the slope of the tapered field plate and the electric field concentration at the gate edge can be successfully suppressed. The gate leakage current of proposed device at VGS= -5 V and VDS= 100 V was decreased by 2-3 orders compared with that of the conventional one. The breakdown voltage of proposed device was 880 V while that of conventional one was 548 V.


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