Mirau-Based CSI with Oscillating Reference Mirror for Vibration Compensation in In-Process Applications

We present a Mirau-type coherence scanning interferometer (CSI) with an oscillating reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical path with the CSI. The IDS works simultaneously with the CSI and measures the distance changes during the depth scanning process with high temporal resolution. The additional information acquired by the IDS is used to correct the CSI data disturbed by unwanted distance changes due to environmental vibrations subsequent to the measurement. Due to the fixed reference mirror in commercial Mirau objectives, a Mirau attachment (MA) comprising an oscillating reference mirror is designed and built. Compared to our previous systems based on the Michelson and the Linnik interferometer, the MA represents a novel solution that completes the range of possible applications. Due to its advantages, the Mirau setup is the preferred and most frequently used interferometer type in industry. Therefore, the industrial use is ensured by this development. We investigate the functioning of the system and the capability of the vibration compensation by several measurements on various surface topographies.

Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces

Modern optical engineering requires increasingly sophisticated interferometry methods capable of conducting subnanometer scale measurements of the large aperture, high-precision optical component surfaces. However, the accuracy of interferometry measurement is limited to the accuracy with which the surface of the reference mirror employed in the interferometer system is known, and the influence of gravity-induced deformation cannot be ignored. This is addressed in the present work by proposing a three-flat testing method based on multiposition rotation interference absolute surface measurement technology that combines the basic theory of N-position rotation with the separability of surface wavefront functions into sums of even and odd functions. These functions provide the rotational symmetric components of the wavefront, which then enables the absolute surface to be reconstructed based on the N-position rotation measurements. In addition, we propose a mechanical clamping combined with computational method to compensate for the gravity-induced deformations of the flats in the multiposition rotation absolute measurements. The high precision of the proposed absolute surface measurement method is demonstrated via simulations. The results of laboratory experiments indicate that the combination compensation method provides the high-precision surface reconstruction outcomes. The present work provides an important contribution for supporting the interferometry measurement of large aperture, high-precision optical component surfaces.

Extension and Limits of Depolarization-Fringe Contrast Roughness Method in Sub-Micron Domain

To guarantee quality standards for the industry, surface properties, particularly those of roughness, must be considered in many areas of application. Today, several methods are available on the market, but some damage the surface to be tested as they measure it by contact. A non-contact method for the precise estimation of sub-micron roughness values is presented, which can be used as an extension of existing roughness measurement techniques to improve them further considering the depolarized light reflected by the sample. This setup is based on a Michelson interferometer, and by introducing a quarter-wave plate on a half part of the reference mirror, the surface roughness can be directly derived by measuring the fringe contrasts. This article introduces a simple model describing the intensity distortions resulting from the microscopic roughness in divided interferograms when considering depolarization. This work aimed to extend the measurement range of the technique developed in a previous work, in which depolarization effects are taken into account. For verification, the experimental results were compared with the fringe contrast technique, which does not consider the depolarization of the scattered light, especially regarding the extended wavelength interval, highlighting the limits of the technique. In addition, simulations of the experiments are presented. For comparison, the reference values of the sample roughness were also generated by measurements with a stylus profiler.

Extended measuring depth dual-wavelength Fourier domain optical coherence tomography

In this work an enhanced wide range dual band spectral domain optical coherence tomography technique (SD-OCT) is presented to increase the depth and accuracy of the measurement of optical A-scan biometry. The setup uses a Michelson interferometer with two wide-spectrum Superluminescent Diodes (SLD). The emissions of the SLDs are filtered by a long-pass filter (900 nm) in front of the reference mirror. The light is spectrally decomposed using a single reflective diffraction grating (1,800 lines/mm) and the whole spectrum captured with two CCD line sensors. The capabilities of the system have been validated using a self-made human model eye.

Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable part geometries. An enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer range. For this purpose, a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate substructures. Evaluations taken show high potential for three linear movements of the object in combination with two angular movements of the tool. The influence of the additional rotation systems on the existing structure of NPMMs has been investigated further on. Test series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are realized. As a result of these test series, the necessity of in situ position determination of the tool became very clear. The tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry–Pérot interferometers. FEA optimization has been used to enhance the overall system structure with regard to reproducibility and long-term stability. Results have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the NPMM. The knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.