P-7: High Performance LTPS Thin-film Transistors using Low Cost Polycrystalline Silicon by Blue Laser Annealing

2016 ◽  
Vol 47 (1) ◽  
pp. 1143-1146 ◽  
Author(s):  
Seonghyun Jin ◽  
Mallory Mativenga ◽  
Jin Jang
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Laser Annealing ◽  
Low Cost ◽  
Blue Laser

High-Performance Polycrystalline Silicon Thin-Film Transistors Fabricated by High-Temperature Process with Excimer Laser Annealing

2004 ◽  
Vol 43 (6A) ◽  
pp. 3293-3296 ◽  
Author(s):  
Hiroaki Jiroku ◽  
Mitsutoshi Miyasaka ◽  
Satoshi Inoue ◽  
Yoshifumi Tsunekawa ◽  
Tatsuya Shimoda
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Laser Annealing ◽  
Silicon Thin Film ◽  
Excimer Laser Annealing ◽  
High Temperature Process

High‐performance thin‐film transistors from optimized polycrystalline silicon films

1987 ◽  
Vol 50 (26) ◽  
pp. 1894-1896 ◽  
Author(s):  
D. B. Meakin ◽  
P. A. Coxon ◽  
P. Migliorato ◽  
J. Stoemenos ◽  
N. A. Economou
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

High-performance polycrystalline silicon thin-film transistors prepared via the laser crystallization of the prepatterned channel layer on the bottom-gate structure

2013 ◽  
Vol 529 ◽  
pp. 421-425 ◽  
Author(s):  
Chao-Lung Wang ◽  
I-Che Lee ◽  
Chun-Yu Wu ◽  
Yu-Ting Cheng ◽  
Po-Yu Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Laser Crystallization ◽  
Silicon Thin Film ◽  
Channel Layer ◽  
Gate Structure ◽  
Bottom Gate

High-performance vertically stacked bottom-gate and top-gate polycrystalline silicon thin-film transistors for three-dimensional integrated circuits

2012 ◽  
Vol 77 ◽  
pp. 26-30 ◽  
Author(s):  
I-Che Lee ◽  
Tsung-Che Tsai ◽  
Chun-Chien Tsai ◽  
Po-Yu Yang ◽  
Chao-Lung Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Three Dimensional ◽  
Silicon Thin Film ◽  
Bottom Gate

High-performance and operationally stable organic thin-film transistors using bi-buffer layers with low-cost electrodes

2013 ◽  
Vol 46 (38) ◽  
pp. 385104 ◽  
Author(s):  
Jianlin Zhou ◽  
Yuanyuan Hao ◽  
Xinge Yu ◽  
Nanjia Zhou ◽  
Hui Lin
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Low Cost ◽  
Organic Thin Film Transistors ◽  
Buffer Layers ◽  
Organic Thin Film

Eco-friendly, solution-processed In-W-O thin films and their applications in low-voltage, high-performance transistors

2016 ◽  
Vol 4 (20) ◽  
pp. 4478-4484 ◽  
Author(s):  
Ao Liu ◽  
Guoxia Liu ◽  
Huihui Zhu ◽  
Byoungchul Shin ◽  
Elvira Fortunato ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thin Film Transistors ◽  
High Performance ◽  
Low Voltage ◽  
Low Cost ◽  
Solution Process ◽  
Solution Processed

Eco-friendly IWO thin films are fabricated via a low-cost solution process and employed as channel layers in thin-film transistors.

SiO2formation by thermal evaporation of SiO in oxygen atmosphere used to fabrication of high performance polycrystalline silicon thin film transistors

1994 ◽  
Vol 64 (8) ◽  
pp. 1018-1020 ◽  
Author(s):  
T. Sameshima ◽  
A. Kohno ◽  
M. Sekiya ◽  
M. Hara ◽  
N. Sano
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Thermal Evaporation ◽  
Oxygen Atmosphere ◽  
Silicon Thin Film

Development of high-performance polycrystalline silicon thin-film transistors (TFTs) using defect control process technologies

2002 ◽  
Vol 23 (7) ◽  
pp. 407-409 ◽  
Author(s):  
S. Higashi ◽  
D. Abe ◽  
Y. Hiroshima ◽  
K. Miyashita ◽  
T. Kawamura ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Control Process ◽  
Silicon Thin Film ◽  
Defect Control
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