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Oxygen accumulation effect for depth profiling of thin-multilayered sample using low-energy oxygen ion beam
Surface and Interface Analysis
◽
10.1002/sia.5107
◽
2012
◽
Vol 45
(1)
◽
pp. 107-110
◽
Cited By ~ 1
Author(s):
Suguru Nishinomiya
◽
Naoyoshi Kubota
◽
Shun-ichi Hayashi
◽
Hisataka Takenaka
Keyword(s):
Ion Beam
◽
Depth Profiling
◽
Low Energy
◽
Multilayered Sample
◽
Oxygen Ion
◽
Accumulation Effect
Download Full-text
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References
SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
◽
10.1116/1.4944632
◽
2016
◽
Vol 34
(3)
◽
pp. 03H131
Author(s):
Viktoriia Gorbenko
◽
Franck Bassani
◽
Alexandre Merkulov
◽
Thierry Baron
◽
Mickael Martin
◽
...
Keyword(s):
Ion Beam
◽
Depth Profiling
◽
Low Energy
◽
Ion Beam Sputtering
◽
Oxygen Ion
◽
Beam Sputtering
◽
Sims Depth Profiling
Download Full-text
Effect of low energy oxygen ion beam irradiation on ionic conductivity of solid polymer electrolyte
10.1063/1.4872963
◽
2014
◽
Author(s):
H. Manjunatha
◽
G. N. Kumaraswamy
◽
R. Damle
Keyword(s):
Ionic Conductivity
◽
Polymer Electrolyte
◽
Solid Polymer Electrolyte
◽
Ion Beam
◽
Low Energy
◽
Solid Polymer
◽
Beam Irradiation
◽
Ion Beam Irradiation
◽
Oxygen Ion
Download Full-text
Room-temperature growth of crystalline indium tin oxide films on glass using low-energy oxygen-ion-beam assisted deposition
Journal of Applied Physics
◽
10.1063/1.1538335
◽
2003
◽
Vol 93
(4)
◽
pp. 2262-2266
◽
Cited By ~ 36
Author(s):
C. Liu
◽
T. Matsutani
◽
T. Asanuma
◽
K. Murai
◽
M. Kiuchi
◽
...
Keyword(s):
Tin Oxide
◽
Indium Tin Oxide
◽
Room Temperature
◽
Ion Beam
◽
Oxide Films
◽
Low Energy
◽
Temperature Growth
◽
Oxygen Ion
◽
Ion Beam Assisted Deposition
◽
Tin Oxide Films
Download Full-text
Depth profiling of defect distribution in an AlGaAs/GaAs multiple quantum well structure induced by low-energy ion beam etching
Defect Recognition and Image Processing in Semiconductors 1997
◽
10.1201/9781315140810-93
◽
2017
◽
pp. 453-456
Author(s):
F. Frostf
◽
K. Otte
◽
A. Schindler
◽
G. Lippold
◽
R. Pickenhain
◽
...
Keyword(s):
Quantum Well
◽
Ion Beam
◽
Multiple Quantum Well
◽
Depth Profiling
◽
Low Energy
◽
Multiple Quantum
◽
Ion Beam Etching
◽
Defect Distribution
◽
Quantum Well Structure
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Low energy oxygen ion beam modification of the surface morphology and chemical structure of polyurethane fibers
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/j.nimb.2005.07.224
◽
2006
◽
Vol 243
(1)
◽
pp. 63-74
◽
Cited By ~ 10
Author(s):
K.H. Wong
◽
M. Zinke-Allmang
◽
W.K. Wan
◽
J.Z. Zhang
◽
P. Hu
Keyword(s):
Surface Morphology
◽
Chemical Structure
◽
Ion Beam
◽
Low Energy
◽
Ion Beam Modification
◽
Oxygen Ion
◽
Modification Of The Surface
Download Full-text
Depth profiling by means of the combination of glancing incidence X-ray fluorescence spectrometry with low energy ion beam etching technique
Spectrochimica Acta Part B Atomic Spectroscopy
◽
10.1016/0584-8547(94)00130-n
◽
1995
◽
Vol 50
(3)
◽
pp. 265-270
◽
Cited By ~ 9
Author(s):
W. Frank
◽
H.-J. Thomas
◽
A. Schindler
Keyword(s):
Ion Beam
◽
Depth Profiling
◽
Low Energy
◽
Fluorescence Spectrometry
◽
Etching Technique
◽
Ion Beam Etching
◽
X Ray
Download Full-text
Low‐energy oxygen ion bombardment effect on BaTiO3thin films grown by multi‐ion‐beam reactive sputtering technique
Applied Physics Letters
◽
10.1063/1.109944
◽
1993
◽
Vol 63
(6)
◽
pp. 734-736
◽
Cited By ~ 5
Author(s):
C.‐J. Peng
◽
H. Hu
◽
S. B. Krupanidhi
Keyword(s):
Ion Beam
◽
Ion Bombardment
◽
Reactive Sputtering
◽
Low Energy
◽
Oxygen Ion
Download Full-text
Structural, electrical and optical properties of indium tin oxide films prepared by low-energy oxygen-ion-beam assisted deposition
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/s0168-583x(03)00760-2
◽
2003
◽
Vol 206
◽
pp. 348-352
◽
Cited By ~ 10
Author(s):
C. Liu
◽
T. Matsutani
◽
T. Asanuma
◽
M. Kiuchi
Keyword(s):
Optical Properties
◽
Tin Oxide
◽
Indium Tin Oxide
◽
Ion Beam
◽
Oxide Films
◽
Low Energy
◽
Electrical And Optical Properties
◽
Oxygen Ion
◽
Ion Beam Assisted Deposition
◽
Tin Oxide Films
Download Full-text
Fermi Level Modulation of n-type Doped Single Walled Carbon Nanotube using Buried Local-Gate FET Structure by Oxygen Ion Implantation with Ultra-low Energy Ion Beam of 25eV
10.7567/ssdm.2005.g-7-5
◽
2005
◽
Author(s):
Takafumi Kamimura
◽
Kazuhiro Yamamoto
◽
Kazuhiko Matsumoto
Keyword(s):
Carbon Nanotube
◽
Ion Implantation
◽
Fermi Level
◽
Ion Beam
◽
Low Energy
◽
Single Walled Carbon Nanotube
◽
Single Walled Carbon
◽
Oxygen Ion
◽
Oxygen Ion Implantation
Download Full-text
Effect of low energy oxygen ion beam on optical and electrical characteristics of dual ion beam sputtered SnO2 thin films
Thin Solid Films
◽
10.1016/s0040-6090(99)00078-4
◽
1999
◽
Vol 349
(1-2)
◽
pp. 126-129
◽
Cited By ~ 19
Author(s):
Jae-Ho Chung
◽
Yong-Sahm Choe
◽
Dae-Seung Kim
Keyword(s):
Thin Films
◽
Ion Beam
◽
Low Energy
◽
Electrical Characteristics
◽
Oxygen Ion
◽
Sno2 Thin Films
Download Full-text
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