Elemental Profiling of III-V MOSFET High-kDielectric Gate Stacks Using EELS Spectrum Imaging
An example of spectrum imaging used for comparison of EELS quantitative analysis techniques on Al-Li
1991 ◽
Vol 49
◽
pp. 726-727
1992 ◽
Vol 50
(2)
◽
pp. 1202-1203
2020 ◽
Vol 23
◽
Keyword(s):
Keyword(s):