Topological Optimization of Multilayer Structural Elements of MEMS/NEMS Resonators with an Adhesive Layer Subjected to Mechanical Loads
2019 ◽
Vol 12
(1)
◽
pp. 87-100
2020 ◽
Vol 1515
◽
pp. 042003
2021 ◽
Vol 12
(2)
◽
pp. 2698-2702
2020 ◽
Vol 22
(5)
◽
pp. 114-119
2020 ◽
Vol 2
(3)
◽
pp. 139-148
Keyword(s):
Keyword(s):