Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics

In analogy to the formation of SIMOX (Separation by IMplanted OXygen) material which is presently the most promising silicon-on-insulator technology, high-dose ion implantation of cobalt in silicon is used to synthesise buried CoSi2 layers. So far, for high-dose ion implantation of Co in Si, only formation of CoSi2 is reported. In this paper it will be shown that CoSi inclusions occur when the stoichiometric Co concentration is exceeded at the peak of the Co distribution. 350 keV Co+ ions are implanted into (001) Si wafers to doses of 2, 4 and 7×l017 per cm2. During the implantation the wafer is kept at ≈ 550°C, using beam heating. The subsequent annealing treatment was performed in a conventional nitrogen flow furnace at 1000°C for 5 to 30 minutes (FA) or in a dual graphite strip annealer where isochronal 5s anneals at temperatures between 800°C and 1200°C (RTA) were performed. The implanted samples have been studied by means of Rutherford Backscattering Spectroscopy (RBS) and cross-section Transmission Electron Microscopy (XTEM).

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Silicon-on-insulator technology impacts on SRAM testing

Proceedings 18th IEEE VLSI Test Symposium ◽

10.1109/vtest.2000.843825 ◽

2002 ◽

Author(s):

R.D. Adams ◽

P. Shephard

Keyword(s):

Silicon On Insulator ◽

Silicon On Insulator Technology

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Advantages of Faceted P-Raised Source/Drain in Fully Depleted Silicon on Insulator Technology

ECS Transactions ◽

10.1149/08607.0199ecst ◽

2018 ◽

Vol 86 (7) ◽

pp. 199-206 ◽

Cited By ~ 1

Author(s):

Ömür Işıl Aydin ◽

Judson Robert Holt ◽

Cyrille Le Royer ◽

Laks Vanamurthy ◽

Thomas Feudel ◽

...

Keyword(s):

Silicon On Insulator ◽

Fully Depleted ◽

Silicon On Insulator Technology

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Fully three-dimensional analysis of a photonic crystal assisted silicon on insulator waveguide bend

International Journal of Modern Physics B ◽

10.1142/s0217979218503447 ◽

2018 ◽

Vol 32 (31) ◽

pp. 1850344 ◽

Cited By ~ 1

Author(s):

N. Eti ◽

Z. Çetin ◽

H. S. Sözüer

Keyword(s):

Photonic Crystal ◽

Numerical Study ◽

Fdtd Method ◽

Three Dimensional ◽

Silicon On Insulator ◽

Geometrical Parameters ◽

Low Loss ◽

Bending Loss ◽

Difference Time ◽

Waveguide Bend

A detailed numerical study of low-loss silicon on insulator (SOI) waveguide bend is presented using the fully three-dimensional (3D) finite-difference time-domain (FDTD) method. The geometrical parameters are optimized to minimize the bending loss over a range of frequencies. Transmission results for the conventional single bend and photonic crystal assisted SOI waveguide bend are compared. Calculations are performed for the transmission values of TE-like modes where the electric field is strongly transverse to the direction of propagation. The best obtained transmission is over 95% for TE-like modes.

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Indication of the Coronavirus Model Using a Nanowire Biosensor

Proceedings ◽

10.3390/iecb2020-07228 ◽

2020 ◽

Vol 60 (1) ◽

pp. 50

Author(s):

Vladimir Generalov ◽

Olga Naumova ◽

Dmitry Shcherbakov ◽

Alexander Safatov ◽

Boris Zaitsev ◽

...

Keyword(s):

Field Effect ◽

Field Effect Transistor ◽

Negative Charge ◽

Positive Charge ◽

Silicon On Insulator ◽

Nanowire Surface ◽

Before And After ◽

Effect Transistor ◽

Current Value ◽

Silicon On Insulator Technology

The presented results indicate virus-like particles of the coronavirus (CVP) using a nanowire (NW) biosensor based on silicon-on-insulator technology. In the experiment, we used suspensions of CVP and of specific antibodies to the virus. Measurements of the current value of the field-effect transistor before and after the introduction of the CVP on the surface of the nanowire were performed. Results showed antibody + CVP complexes on the phase section with the surface of the nanowire modulate the current of the field-effect transistor; CVP has an electrically positive charge on the phase section “nanowire surface-viral suspension»; antibody + CVP complexes have an electrically negative charge on the phase section “nanowire surface-viral suspension”; the sensitivity of the biosensor is made up of 10−18 M; the time display was 200–300 s.

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