Simulated and measured surface roughness in high-speed grinding of silicon carbide wafers
2016 ◽
Vol 91
(1-4)
◽
pp. 719-730
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2014 ◽
Vol 1027
◽
pp. 140-145
Keyword(s):
2016 ◽
Vol 10
(2)
◽
pp. JAMDSM0020-JAMDSM0020
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2015 ◽
Vol 1120-1121
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pp. 1251-1256
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2013 ◽
Vol 446-447
◽
pp. 275-278
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Keyword(s):
2019 ◽
Vol 105
(7-8)
◽
pp. 2771-2784
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2014 ◽
Vol 575
◽
pp. 350-354
2010 ◽
Vol 126-128
◽
pp. 154-158
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Keyword(s):
2011 ◽
Vol 487
◽
pp. 108-112
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2015 ◽
Vol 86
(1-4)
◽
pp. 799-808
◽
Keyword(s):
Keyword(s):