Trace element determination of high-purity chemicals for the processing of semiconductors with high-resolution ICP-mass spectrometry using stable isotope dilution analysis (IDA)

1997 ◽  
Vol 359 (4-5) ◽  
pp. 410-413 ◽  
Author(s):  
J. Dahmen ◽  
M. Pfluger ◽  
M. Martin ◽  
L. Rottmann ◽  
G. Weichbrodt
Keyword(s):  
Mass Spectrometry ◽  
High Resolution ◽  
Stable Isotope ◽  
Isotope Dilution Analysis ◽  
Trace Element Determination ◽  
Stable Isotope Dilution Analysis ◽  
Element Determination ◽  
Stable Isotope Dilution ◽  
Icp Mass Spectrometry
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