A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure

2005 ◽  
Vol 11 (2-3) ◽  
pp. 111-116 ◽  
Author(s):  
Y. Chen ◽  
J. Jiao ◽  
B. Xiong ◽  
L. Che ◽  
X. Li ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Tuning Fork ◽  
High Q ◽  
Q Factors

scholarly journals A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

Sensors ◽  
2021 ◽  
Vol 21 (19) ◽  
pp. 6428
Author(s):  
Pengfei Xu ◽  
Chaowei Si ◽  
Yurong He ◽  
Zhenyu Wei ◽  
Lu Jia ◽  
...  
Keyword(s):  
Tuning Fork ◽  
High Reliability ◽  
Three Dimensional ◽  
Low Frequency ◽  
Wafer Level ◽  
Loop Control ◽  
High Q ◽  
3D Packaging ◽  
Q Factors ◽  
Packaging Technique

Tuning fork gyroscopes (TFGs) are promising for potential high-precision applications. This work proposes and experimentally demonstrates a novel high-Q dual-mass tuning fork microelectromechanical system (MEMS) gyroscope utilizing three-dimensional (3D) packaging techniques. Except for two symmetrically decoupled proof masses (PM) with synchronization structures, a symmetrically decoupled lever structure is designed to force the antiparallel, antiphase drive mode motion and eliminate low frequency spurious modes. Thermoelastic damping (TED) and anchor loss are greatly reduced by the linearly coupled, momentum- and torque-balanced antiphase sense mode. Moreover, a novel 3D packaging technique is used to realize high Q-factors. A composite substrate encapsulation cap, fabricated by through-silicon-via (TSV) and glass-in-silicon (GIS) reflow processes, is anodically bonded to the wafer-scale sensing structures. A self-developed control circuit is adopted to realize loop control and characterize gyroscope performances. It is shown that a high-reliability electrical connection, together with a high air impermeability package, can be fulfilled with this 3D packaging technique. Furthermore, the Q-factors of the drive and sense modes reach up to 51,947 and 49,249, respectively. This TFG realizes a wide measurement range of ±1800 °/s and a high resolution of 0.1°/s with a scale factor nonlinearity of 720 ppm after automatic mode matching. In addition, long-term zero-rate output (ZRO) drift can be effectively suppressed by temperature compensation, inducing a small angle random walk (ARW) of 0.923°/√h and a low bias instability (BI) of 9.270°/h.

scholarly journals A Novel High-Q Dual Mass MEMS Tuning Fork Gyroscope Based On 3D Wafer-Level Packaging

2021 ◽  
Author(s):  
Pengfei Xu ◽  
Yurong He ◽  
Zhenyu Wei ◽  
Lu Jia ◽  
Guowei Han ◽  
...  
Keyword(s):  
Tuning Fork ◽  
High Reliability ◽  
Three Dimensional ◽  
Low Frequency ◽  
Wafer Level ◽  
Loop Control ◽  
High Q ◽  
3D Packaging ◽  
Q Factors ◽  
Packaging Technique

Tuning fork gyroscopes (TFGs) are promising for potential high-precision applications. This work proposes and experimentally demonstrates a novel high-Q dual mass tuning fork microelectro-mechanical system (MEMS) gyroscope utilizing three-dimensional (3D) packaging techniques. Except for two symmetrically-decoupled proof masses (PM) with synchronization structures, a symmetrically-decoupled lever structure is designed to force the antiparallel, antiphase drive-mode motion and basically eliminate the low-frequency spurious modes. The thermoelastic damping (TED) and anchor loss are greatly reduced by the linearly-coupled, momentum- and torque-balanced antiphase sense mode. Besides, a novel 3D packaging technique is used to realize high Q-factors. A composite substrate encapsulation cap, fabricated by through-silicon-via (TSV) and glass-in-silicon (GIS) reflow processes, is anodically bonded to the sensing structures at wafer scales. A self-developed control circuit is adopted to realize loop control and characterize gyro-scope performances. It is shown that a high-reliability electrical connection together with a high-air-impermeability package can be fulfilled with this 3D packaging technique. Furthermore, the Q-factors of the drive and sense modes reach up to 51947 and 49249, respectively. This TFG realizes a wide measurement range of ±1800° /s and a high resolution of 0.1° /s with a scale-factor nonlinearity 720 ppm after automatic mode-matching. Besides, the long-term zero-rate output (ZRO) drift can be effectively suppressed by temperature compensation, inducing a small angle random walk (ARW) of 0.923°/√h and a low bias instability (BI) of 9.270°/h.

Design and Simulation of Capacitive Micromechaned Gyroscope

2011 ◽  
Vol 211-212 ◽  
pp. 909-913
Author(s):  
Yun Bo Shi ◽  
Xing Juan Zhao ◽  
Jun Tang ◽  
Jun Liu ◽  
Rui Rong Wang
Keyword(s):  
Atmospheric Pressure ◽  
Simulation Analysis ◽  
High Sensitivity ◽  
Drive Mode ◽  
Close Match ◽  
High Q ◽  
Air Damping ◽  
Large Numbers ◽  
Detection Mode ◽  
Micromachined Gyroscope

By researching and investigating the structure of capacitive gyroscopes, A novel capacitive micromachined gyroscope is proposed and the structure is designed. The method of electrostatic comber drive, capacitive detection of bar structure is used for the structure, and these make the gyroscope high sensitivity. The main air damping of the drive mode and detection mode is slide film damping, it is possible to make the gyroscope achieve high Q-values at atmospheric pressure. The decoupled gyroscope is designed, too. By large numbers of simulation analysis， frequencies of the first six steps mode are gained, nature frequencies of drive mode and sense mode of gyroscope are a close match, and rationality of the structure is validated. At last, the structure encapsulated is presented.

Optical properties of GaN Photonic Crystal Membrane Nanocavities at Blue Wavelengths

2005 ◽  
Vol 892 ◽  
Author(s):  
Yong-Seok Choi ◽  
Cedrik Meier ◽  
Rajat Sharma ◽  
Kevin Hennessy ◽  
Elaine D. Haberer ◽  
...  
Keyword(s):  
Optical Properties ◽  
Photonic Crystal ◽  
Quantum Wells ◽  
Multiple Quantum Well ◽  
Light Extraction ◽  
Design Parameters ◽  
Multiple Quantum ◽  
Membrane Structures ◽  
High Q ◽  
Q Factors

AbstractWe have investigated the design parameters for high-Q photonic-crystal (PC) bandgap modes in the emission wavelengths of InGaN/GaN multiple quantum wells. We demonstrate experimental schemes to realize 2D triangular-lattice PC membrane structures, which is essential to obtain photonic bandgap (PBG) modes, and the optical properties of L7 membrane nanocavities that consist of seven missing holes in the Γ-K direction. L7 cavities show pronounced resonances with Q factors of 300 to 800 in the PBG as well as the enhancement of light extraction of the broad InGaN/GaN multiple-quantum-well emission by the 2D PBG.

High and Moderate-Level Vacuum Packaging of Vibratory MEMS

2013 ◽  
Vol 2013 (1) ◽  
pp. 000705-000710 ◽  
Author(s):  
Igor P. Prikhodko ◽  
Brenton R. Simon ◽  
Gunjana Sharma ◽  
Sergei A. Zotov ◽  
Alexander A. Trusov ◽  
...  
Keyword(s):  
Vacuum Packaging ◽  
Moderate Level ◽  
Silicon On Insulator ◽  
Quality Factors ◽  
High Q ◽  
Hermetic Sealing ◽  
Hemispherical Resonator ◽  
Q Factors ◽  
Grade Performance

We report vacuum packaging procedures for low-stress die attachment and versatile hermetic sealing of resonant MEMS. The developed in-house infrastructure allows for both high and moderate-level vacuum packaging addressing the requirements of various applications. Prototypes of 100 μm silicon-on-insulator Quadruple Mass Gyroscopes (QMGs) were packaged using the developed process with and without getters. Characterization of stand-alone packaged devices with no getters resulted in stable quality factors (Q-factors) of 1000 (corresponding to 0.5 Torr vacuum level), while devices sealed with activated getters demonstrated Q-factors of 1.2 million (below 0.1 mTorr level inside the package). Due to the high Q-factors achieved in this work, we project that the QMG used in this work can potentially reach the navigation-grade performance, potentially bridging the gap between the inertial silicon MEMS and the state-of-the-art fused quartz hemispherical resonator gyroscopes.

scholarly journals A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage

Micromachines ◽  
2020 ◽  
Vol 11 (8) ◽  
pp. 737
Author(s):  
Tianyun Wang ◽  
Zeji Chen ◽  
Qianqian Jia ◽  
Quan Yuan ◽  
Jinling Yang ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Integrated Circuit ◽  
Nonlinear Behavior ◽  
Silicon On Insulator ◽  
Transduction Efficiency ◽  
Air Gaps ◽  
High Q ◽  
Bulk Mode ◽  
Q Factors ◽  
Quality Factor Q

This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A SOI-based fabrication process was developed to produce the resonators with 70 nm air gaps, which have a high resonance frequency of 51.3 MHz and high Q factors over 8000 in air and over 30,000 in vacuum. The high Q values, nano-scale air gaps, and large electrode area greatly improve the capacitive transduction efficiency, which decreases the bias voltage for the high-stiffness bulk mode resonators with high Q. The resonator showed the nonlinear behavior. The proposed resonator can be applied to construct a wireless communication system with low power consumption and integrated circuit (IC) integration.

scholarly journals Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Nanomaterials ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 1218 ◽  
Author(s):  
Jianhao Zhang ◽  
Zhiwei Fang ◽  
Jintian Lin ◽  
Junxia Zhou ◽  
Min Wang ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Femtosecond Laser ◽  
Wedge Angle ◽  
Quality Factors ◽  
High Quality ◽  
Surface Smoothness ◽  
High Q ◽  
Q Factors

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

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