Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry

2005 ◽  
Vol 44 (2) ◽  
pp. 175-183 ◽  
Author(s):  
Badariah Bais ◽  
Burhanuddin Yeop Majlis
2021 ◽  
Vol 30 (1) ◽  
pp. 19-27
Author(s):  
Kumar Gomathi ◽  
Arunachalam Balaji ◽  
Thangaraj Mrunalini

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.


2018 ◽  
Vol 63 (6) ◽  
pp. 699-708 ◽  
Author(s):  
Apoorva Dwivedi ◽  
Gargi Khanna

Abstract The present work attempts to enhance the sensitivity of a folded beam microelectromechanical systems (MEMS) capacitive accelerometer by optimising the device geometry. The accelerometer is intended to serve as a microphone in the fully implantable hearing application which can be surgically implanted in the middle ear bone structure. For the efficient design of the accelerometer as a fully implantable biomedical device, the design parameters such as size, weight and resonant frequency have been considered. The geometrical parameters are varied to obtain the optimum sensitivity considering the design constraints and the stability of the structure. The optimised design is simulated and verified using COMSOL MULTIPHYSICS 4.2. The stability of the device is ensured using eigenfrequency analysis. Optimised results of the device geometry are presented and discussed. The accelerometer has a sensing area of 1 mm2 and attains a nominal capacitance of 5.3 pF and an optimum sensitivity of 6.89 fF.


2011 ◽  
Vol 131 (7) ◽  
pp. 235-239 ◽  
Author(s):  
Kaoru Yamashita ◽  
Tomoya Yoshizaki ◽  
Minoru Noda ◽  
Masanori Okuyama

Sensors ◽  
2021 ◽  
Vol 21 (13) ◽  
pp. 4539
Author(s):  
Roberto de Fazio ◽  
Elisa Perrone ◽  
Ramiro Velázquez ◽  
Massimo De Vittorio ◽  
Paolo Visconti

The evolution of low power electronics and the availability of new smart materials are opening new frontiers to develop wearable systems for medical applications, lifestyle monitoring, and performance detection. This paper presents the development and realization of a novel smart insole for monitoring the plantar pressure distribution and gait parameters; indeed, it includes a piezoresistive sensing matrix based on a Velostat layer for transducing applied pressure into an electric signal. At first, an accurate and complete characterization of Velostat-based pressure sensors is reported as a function of sizes, support material, and pressure trend. The realization and testing of a low-cost and reliable piezoresistive sensing matrix based on a sandwich structure are discussed. This last is interfaced with a low power conditioning and processing section based on an Arduino Lilypad board and an analog multiplexer for acquiring the pressure data. The insole includes a 3-axis capacitive accelerometer for detecting the gait parameters (swing time and stance phase time) featuring the walking. A Bluetooth Low Energy (BLE) 5.0 module is included for transmitting in real-time the acquired data toward a PC, tablet or smartphone, for displaying and processing them using a custom Processing® application. Moreover, the smart insole is equipped with a piezoelectric harvesting section for scavenging energy from walking. The onfield tests indicate that for a walking speed higher than 1 ms−1, the device’s power requirements (i.e., ) was fulfilled. However, more than 9 days of autonomy are guaranteed by the integrated 380-mAh Lipo battery in the total absence of energy contributions from the harvesting section.


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